TY - JOUR
T1 - Hardness and wear properties of Ti-Mo-C-N film
AU - Toyoda, Toshiaki
AU - Sutou, Yuji
AU - Komiyama, Shoko
AU - Ando, Daisuke
AU - Koike, Junichi
AU - Wang, Mei
N1 - Publisher Copyright:
© 2016 The Japan Institute of Metals and Materials.
PY - 2016
Y1 - 2016
N2 - The hardness and wear properties of Ti-Mo-C-N films were investigated by nanoindentation and ball-on-disc measurements, respectively. Ti-Mo-C-N films were deposited onto a stainless steel substrate by a reactive RF magnetron sputtering in the mixture of argon (7.5 ccm) and nitrogen (06.0 ccm) gases using Ti25Mo25C50 target. Ti-Mo-C film deposited without nitrogen gas flow showed a hardness of 34.8 GPa. The hardness drastically decreased with increasing nitrogen gas flow rate (fN2) and reached to a minimum hardness of 16.4 GPa at fN2 = 2:0 ccm. Contrarily, at over fN2 = 3:0 ccm, the hardness drastically increased with increasing fN2 and reached a maximal value of 32 GPa, and then slightly decreased again with further increase of fN2 It was found by TEM observation that the drastic decrease in hardness is caused by the formation of nanocrystalline microstructure, while the increase in hardness is due to the microstructural change from nanocrystalline to columnar structure. The friction coefficient decreased with increasing fN2 and the film deposited at fN2 = 5:0 ccm showed a minimum value of 0.27. The simple oxidation test in air indicated that lubricious MoO3 is easy to be formed in the film deposited at a high fN2, which should cause the reduction of friction coefficient.
AB - The hardness and wear properties of Ti-Mo-C-N films were investigated by nanoindentation and ball-on-disc measurements, respectively. Ti-Mo-C-N films were deposited onto a stainless steel substrate by a reactive RF magnetron sputtering in the mixture of argon (7.5 ccm) and nitrogen (06.0 ccm) gases using Ti25Mo25C50 target. Ti-Mo-C film deposited without nitrogen gas flow showed a hardness of 34.8 GPa. The hardness drastically decreased with increasing nitrogen gas flow rate (fN2) and reached to a minimum hardness of 16.4 GPa at fN2 = 2:0 ccm. Contrarily, at over fN2 = 3:0 ccm, the hardness drastically increased with increasing fN2 and reached a maximal value of 32 GPa, and then slightly decreased again with further increase of fN2 It was found by TEM observation that the drastic decrease in hardness is caused by the formation of nanocrystalline microstructure, while the increase in hardness is due to the microstructural change from nanocrystalline to columnar structure. The friction coefficient decreased with increasing fN2 and the film deposited at fN2 = 5:0 ccm showed a minimum value of 0.27. The simple oxidation test in air indicated that lubricious MoO3 is easy to be formed in the film deposited at a high fN2, which should cause the reduction of friction coefficient.
KW - Friction coefficient
KW - Hardness
KW - Titanium-molybdenum-carbonitride
KW - Wear resistance
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U2 - 10.2320/matertrans.M2015383
DO - 10.2320/matertrans.M2015383
M3 - Article
AN - SCOPUS:84960388272
SN - 1345-9678
VL - 57
SP - 362
EP - 367
JO - Materials Transactions
JF - Materials Transactions
IS - 3
ER -