TY - JOUR
T1 - Heat-resistant polyarylates for waveguide-type device application
AU - Sugihara, Okihiro
AU - Tomiki, Masahiro
AU - Fujimura, Hisashi
AU - Egami, Chikara
AU - Okamoto, Naomichi
AU - Akizuki, Takamasa
AU - Shirai, Hiromasa
PY - 2000/11/15
Y1 - 2000/11/15
N2 - Polyarylates (PARs) with high glass transition temperature (Tg) of over 200 °C are newly synthesized and used for waveguide-type device application. Thermal and optical properties of PARs are investigated, and results indicate that PARs show high thermal stability as well as high optical transparency in the visible region. High-resolution relief gratings on PAR thin films are fabricated by a direct electron-beam (EB) writing technique together with thermal development. Using a reactive-ion-etching (RIE) technique, the waveguide channel ridge was fabricated.
AB - Polyarylates (PARs) with high glass transition temperature (Tg) of over 200 °C are newly synthesized and used for waveguide-type device application. Thermal and optical properties of PARs are investigated, and results indicate that PARs show high thermal stability as well as high optical transparency in the visible region. High-resolution relief gratings on PAR thin films are fabricated by a direct electron-beam (EB) writing technique together with thermal development. Using a reactive-ion-etching (RIE) technique, the waveguide channel ridge was fabricated.
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U2 - 10.1143/jjap.39.l1174
DO - 10.1143/jjap.39.l1174
M3 - Article
AN - SCOPUS:0034316176
SN - 0021-4922
VL - 39
SP - L1174-L1176
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 11 B
ER -