Heat-resistant polyarylates for waveguide-type device application

Okihiro Sugihara, Masahiro Tomiki, Hisashi Fujimura, Chikara Egami, Naomichi Okamoto, Takamasa Akizuki, Hiromasa Shirai

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Polyarylates (PARs) with high glass transition temperature (Tg) of over 200 °C are newly synthesized and used for waveguide-type device application. Thermal and optical properties of PARs are investigated, and results indicate that PARs show high thermal stability as well as high optical transparency in the visible region. High-resolution relief gratings on PAR thin films are fabricated by a direct electron-beam (EB) writing technique together with thermal development. Using a reactive-ion-etching (RIE) technique, the waveguide channel ridge was fabricated.

Original languageEnglish
Pages (from-to)L1174-L1176
JournalJapanese journal of applied physics
Issue number11 B
Publication statusPublished - 2000 Nov 15
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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