Ultra-Miniature fiber optic sensor of 125 μm diameter has been developed by using MEMS fabrication techniques. The Fabry-Perot cavity is formed at the end of an optical fiber. The pressure induced deformation of the Fabry-Perot cavity diaphragm alters the cavity length. Fabricated sensor structures exhibited temperature dependency. To solve this problem, hermetic sealing using a thin-film solder bonding and Cr thin-film deposition on the sidewall of the sensor have been tried.
|Number of pages||4|
|Publication status||Published - 2006|
|Event||13th International Display Workshops, IDW '06 - Otsu, Japan|
Duration: 2006 Dec 6 → 2006 Dec 6
|Conference||13th International Display Workshops, IDW '06|
|Period||06/12/6 → 06/12/6|