Hermitically sealed Ultra-Miniature fiber-optic pressure sensor

S. Nakamura, T. Matsunaga, K. Totsu, M. Esashi, Y. Haga

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)


Ultra-Miniature fiber optic sensor of 125 μm diameter has been developed by using MEMS fabrication techniques. The Fabry-Perot cavity is formed at the end of an optical fiber. The pressure induced deformation of the Fabry-Perot cavity diaphragm alters the cavity length. Fabricated sensor structures exhibited temperature dependency. To solve this problem, hermetic sealing using a thin-film solder bonding and Cr thin-film deposition on the sidewall of the sensor have been tried.

Original languageEnglish
Number of pages4
Publication statusPublished - 2006
Event13th International Display Workshops, IDW '06 - Otsu, Japan
Duration: 2006 Dec 62006 Dec 6


Conference13th International Display Workshops, IDW '06


Dive into the research topics of 'Hermitically sealed Ultra-Miniature fiber-optic pressure sensor'. Together they form a unique fingerprint.

Cite this