Abstract
Ultra-Miniature fiber optic sensor of 125 μm diameter has been developed by using MEMS fabrication techniques. The Fabry-Perot cavity is formed at the end of an optical fiber. The pressure induced deformation of the Fabry-Perot cavity diaphragm alters the cavity length. Fabricated sensor structures exhibited temperature dependency. To solve this problem, hermetic sealing using a thin-film solder bonding and Cr thin-film deposition on the sidewall of the sensor have been tried.
| Original language | English |
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| Pages | 1553-1556 |
| Number of pages | 4 |
| Publication status | Published - 2006 |
| Event | 13th International Display Workshops, IDW '06 - Otsu, Japan Duration: 2006 Dec 6 → 2006 Dec 6 |
Conference
| Conference | 13th International Display Workshops, IDW '06 |
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| Country/Territory | Japan |
| City | Otsu |
| Period | 06/12/6 → 06/12/6 |