Heterogeneous integration of MEMS on LSI

Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	372-375
Number of pages	4
Journal	Journal of Japan Institute of Electronics Packaging
Volume	20
Issue number	6
DOIs	https://doi.org/10.5104/jiep.20.372
Publication status	Published - 2017 Sept

ASJC Scopus subject areas

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