TY - GEN
T1 - High-aspect-ratio and self-sensing probe for AMF based on micro-fabrication
AU - He, Gaofa
AU - Gao, Wei
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011
Y1 - 2011
N2 - The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever's dynamic and static performance.
AB - The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever's dynamic and static performance.
KW - Atomic force microscope (AFM)
KW - Finite element method (FEM)
KW - Micro-fabrication
KW - Scanning probe
UR - http://www.scopus.com/inward/record.url?scp=80053097669&partnerID=8YFLogxK
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U2 - 10.4028/www.scientific.net/AMR.317-319.1645
DO - 10.4028/www.scientific.net/AMR.317-319.1645
M3 - Conference contribution
AN - SCOPUS:80053097669
SN - 9783037852163
T3 - Advanced Materials Research
SP - 1645
EP - 1648
BT - Equipment Manufacturing Technology and Automation
T2 - 2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011
Y2 - 16 September 2011 through 18 September 2011
ER -