High coercivity characteristics of FePtB exchange-coupled nanocomposite thick film spring magnets produced by sputtering

Parmanand Sharma; Junya Waki; Neelam Kaushik; Dmitri V. Louzguine-Luzgin; Hisamichi Kimura; Akihisa Inoue

doi:10.1016/j.actamat.2007.03.022

High coercivity characteristics of FePtB exchange-coupled nanocomposite thick film spring magnets produced by sputtering

Parmanand Sharma, Junya Waki, Neelam Kaushik, Dmitri V. Louzguine-Luzgin, Hisamichi Kimura, Akihisa Inoue

Tohoku University

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

Thick film magnets (∼3.2 μm) deposited on silicon substrate at processing temperatures lower than 400 °C, exhibiting high coercivity (H_c ∼ 604 kA m^-1), high maximum energy product [(BH)_max = 95 kJ m^-3] and good surface properties, were obtained by sputtering technique. The effects of sputtering power, substrate temperature (T_s) and film thickness on the magnetic properties of the films were studied. Films exhibiting very good hard magnetic properties are mainly made up of nanosized hard (L1₀-FePt) and soft (Fe₂B and Fe₃B) magnetic phases, which are exchange coupled. The exchange spring behavior in these films was investigated and a high recoil rate of more than 90% was obtained. The ability to deposit permanent magnet thick films exhibiting good hard magnetic as well as surface properties on silicon, as demonstrated in the present work, is very promising for the fabrication of micromagnets for magnetic MEMS.

Original language	English
Pages (from-to)	4203-4212
Number of pages	10
Journal	Acta Materialia
Volume	55
Issue number	12
DOIs	https://doi.org/10.1016/j.actamat.2007.03.022
Publication status	Published - 2007 Jul

Keywords

Exchange coupling
FePtB
Nanocomposite
Recoil rate
Thick film spring magnets

Access to Document

10.1016/j.actamat.2007.03.022

Cite this

@article{b85ccc5080a541ff926488d74379ae04,

title = "High coercivity characteristics of FePtB exchange-coupled nanocomposite thick film spring magnets produced by sputtering",

abstract = "Thick film magnets (∼3.2 μm) deposited on silicon substrate at processing temperatures lower than 400 °C, exhibiting high coercivity (Hc ∼ 604 kA m-1), high maximum energy product [(BH)max = 95 kJ m-3] and good surface properties, were obtained by sputtering technique. The effects of sputtering power, substrate temperature (Ts) and film thickness on the magnetic properties of the films were studied. Films exhibiting very good hard magnetic properties are mainly made up of nanosized hard (L10-FePt) and soft (Fe2B and Fe3B) magnetic phases, which are exchange coupled. The exchange spring behavior in these films was investigated and a high recoil rate of more than 90% was obtained. The ability to deposit permanent magnet thick films exhibiting good hard magnetic as well as surface properties on silicon, as demonstrated in the present work, is very promising for the fabrication of micromagnets for magnetic MEMS.",

keywords = "Exchange coupling, FePtB, Nanocomposite, Recoil rate, Thick film spring magnets",

author = "Parmanand Sharma and Junya Waki and Neelam Kaushik and Louzguine-Luzgin, {Dmitri V.} and Hisamichi Kimura and Akihisa Inoue",

year = "2007",

month = jul,

doi = "10.1016/j.actamat.2007.03.022",

language = "English",

volume = "55",

pages = "4203--4212",

journal = "Acta Materialia",

issn = "1359-6454",

publisher = "Elsevier Ltd.",

number = "12",

}

TY - JOUR

T1 - High coercivity characteristics of FePtB exchange-coupled nanocomposite thick film spring magnets produced by sputtering

AU - Sharma, Parmanand

AU - Waki, Junya

AU - Kaushik, Neelam

AU - Louzguine-Luzgin, Dmitri V.

AU - Kimura, Hisamichi

AU - Inoue, Akihisa

PY - 2007/7

Y1 - 2007/7

N2 - Thick film magnets (∼3.2 μm) deposited on silicon substrate at processing temperatures lower than 400 °C, exhibiting high coercivity (Hc ∼ 604 kA m-1), high maximum energy product [(BH)max = 95 kJ m-3] and good surface properties, were obtained by sputtering technique. The effects of sputtering power, substrate temperature (Ts) and film thickness on the magnetic properties of the films were studied. Films exhibiting very good hard magnetic properties are mainly made up of nanosized hard (L10-FePt) and soft (Fe2B and Fe3B) magnetic phases, which are exchange coupled. The exchange spring behavior in these films was investigated and a high recoil rate of more than 90% was obtained. The ability to deposit permanent magnet thick films exhibiting good hard magnetic as well as surface properties on silicon, as demonstrated in the present work, is very promising for the fabrication of micromagnets for magnetic MEMS.

AB - Thick film magnets (∼3.2 μm) deposited on silicon substrate at processing temperatures lower than 400 °C, exhibiting high coercivity (Hc ∼ 604 kA m-1), high maximum energy product [(BH)max = 95 kJ m-3] and good surface properties, were obtained by sputtering technique. The effects of sputtering power, substrate temperature (Ts) and film thickness on the magnetic properties of the films were studied. Films exhibiting very good hard magnetic properties are mainly made up of nanosized hard (L10-FePt) and soft (Fe2B and Fe3B) magnetic phases, which are exchange coupled. The exchange spring behavior in these films was investigated and a high recoil rate of more than 90% was obtained. The ability to deposit permanent magnet thick films exhibiting good hard magnetic as well as surface properties on silicon, as demonstrated in the present work, is very promising for the fabrication of micromagnets for magnetic MEMS.

KW - Exchange coupling

KW - FePtB

KW - Nanocomposite

KW - Recoil rate

KW - Thick film spring magnets

UR - http://www.scopus.com/inward/record.url?scp=34249934628&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34249934628&partnerID=8YFLogxK

U2 - 10.1016/j.actamat.2007.03.022

DO - 10.1016/j.actamat.2007.03.022

M3 - Article

AN - SCOPUS:34249934628

SN - 1359-6454

VL - 55

SP - 4203

EP - 4212

JO - Acta Materialia

JF - Acta Materialia

IS - 12

ER -

High coercivity characteristics of FePtB exchange-coupled nanocomposite thick film spring magnets produced by sputtering

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this