High Density Micro-Thermoelectric Generator Based on Electrodeposition of Bi2Te3and Sb2Te3

Chan Cheng Hou; Nguyen Van Toan; Takahito Ono

doi:10.1109/MEMS51670.2022.9699661

High Density Micro-Thermoelectric Generator Based on Electrodeposition of Bi₂Te₃and Sb₂Te₃

Chan Cheng Hou, Nguyen Van Toan, Takahito Ono

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This work reports a fabrication and evaluation of a high-density micro-thermoelectric generator (micro-TEG) based on electrodeposition of Bi2Te3 and Sb2Te3. The TEG consists of 240 pairs of thermoelectric elements with dimensions of 200 m x 200 m x 80 m, which is formed on a small footprint of 0.8937 cm2. An output voltage of the TEG reaches 20 mV under a temperature difference across the TEG of 1.5 °C. Moreover, energy harvesting from temperature fluctuations of the environment has been demonstrated. The proposed TEG with the high density shows a high potential to harvest from a small temperature difference at near room temperature as a power source for microdevices.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	IEEE Computer Society
Pages	600-603
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699661
Publication status	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 2022 Jan 9 → 2022 Jan 13

Publication series

Name	IEEE Symposium on Mass Storage Systems and Technologies
Volume	2022-January
ISSN (Print)	2160-1968

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	22/1/9 → 22/1/13

Keywords

BiTe
Micro-thermoelectric generator
SbTe
electrodeposition
energy harvesting
thick film

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS51670.2022.9699661

Cite this

Hou, C. C., Van Toan, N., & Ono, T. (2022). High Density Micro-Thermoelectric Generator Based on Electrodeposition of Bi₂Te₃and Sb₂Te₃. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 600-603). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699661

High Density Micro-Thermoelectric Generator Based on Electrodeposition of Bi₂Te₃and Sb₂Te₃. / Hou, Chan Cheng; Van Toan, Nguyen ; Ono, Takahito.

35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society, 2022. p. 600-603 (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hou, CC, Van Toan, N & Ono, T 2022, High Density Micro-Thermoelectric Generator Based on Electrodeposition of Bi₂Te₃and Sb₂Te₃. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Symposium on Mass Storage Systems and Technologies, vol. 2022-January, IEEE Computer Society, pp. 600-603, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 22/1/9. https://doi.org/10.1109/MEMS51670.2022.9699661

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abstract = "This work reports a fabrication and evaluation of a high-density micro-thermoelectric generator (micro-TEG) based on electrodeposition of Bi2Te3 and Sb2Te3. The TEG consists of 240 pairs of thermoelectric elements with dimensions of 200 m x 200 m x 80 m, which is formed on a small footprint of 0.8937 cm2. An output voltage of the TEG reaches 20 mV under a temperature difference across the TEG of 1.5 °C. Moreover, energy harvesting from temperature fluctuations of the environment has been demonstrated. The proposed TEG with the high density shows a high potential to harvest from a small temperature difference at near room temperature as a power source for microdevices. ",

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note = "Funding Information: Part of this work was performed in the Micro/Nanomachining Research Education Center (MNC) of Tohoku University. This work was supported by Cabinet Office, Government of Japan, Cross-ministerial Strategic Innovation Promotion Program (SIP), (funding agency: The New Energy and Industrial Technology Development Organization, NEDO) and also supported in part by JSPS KAKENHI for Young Scientists (Grant number: 20K15147). Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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N2 - This work reports a fabrication and evaluation of a high-density micro-thermoelectric generator (micro-TEG) based on electrodeposition of Bi2Te3 and Sb2Te3. The TEG consists of 240 pairs of thermoelectric elements with dimensions of 200 m x 200 m x 80 m, which is formed on a small footprint of 0.8937 cm2. An output voltage of the TEG reaches 20 mV under a temperature difference across the TEG of 1.5 °C. Moreover, energy harvesting from temperature fluctuations of the environment has been demonstrated. The proposed TEG with the high density shows a high potential to harvest from a small temperature difference at near room temperature as a power source for microdevices.

AB - This work reports a fabrication and evaluation of a high-density micro-thermoelectric generator (micro-TEG) based on electrodeposition of Bi2Te3 and Sb2Te3. The TEG consists of 240 pairs of thermoelectric elements with dimensions of 200 m x 200 m x 80 m, which is formed on a small footprint of 0.8937 cm2. An output voltage of the TEG reaches 20 mV under a temperature difference across the TEG of 1.5 °C. Moreover, energy harvesting from temperature fluctuations of the environment has been demonstrated. The proposed TEG with the high density shows a high potential to harvest from a small temperature difference at near room temperature as a power source for microdevices.

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