TY - JOUR
T1 - High figure of merit (MgHf)xAl1-xN thin films for miniaturizing vibrational energy harvesters
AU - Nguyen, H. H.
AU - Van Minh, L.
AU - Oguchi, H.
AU - Kuwano, H.
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2018/7/26
Y1 - 2018/7/26
N2 - In this paper, we report our development of piezoelectric MgHf co-doped AlN films with high power figure of merit (FoM) for vibrational energy harvesters (VEHs). The (MgHf)xAl1-xN films were deposited on Pt/Ti/SOI substrates by reactive ion-beam sputtering AlN and MgHf targets simultaneously. These studies revealed that we achieved a high FoM of 22.3 GPa at x = 0.12, increasing three-fold that of the pure AlN. Our micro-machined energy harvester exploiting the developed (MgHf)0.12Al0.88N films provided the highest normalized power density (NPD) of 12.04 mW.cm-3.g-2 among the state-of-the-art piezoelectric VEHs. The results opened the way for the development of high-performance VEHs using in wireless sensors network.
AB - In this paper, we report our development of piezoelectric MgHf co-doped AlN films with high power figure of merit (FoM) for vibrational energy harvesters (VEHs). The (MgHf)xAl1-xN films were deposited on Pt/Ti/SOI substrates by reactive ion-beam sputtering AlN and MgHf targets simultaneously. These studies revealed that we achieved a high FoM of 22.3 GPa at x = 0.12, increasing three-fold that of the pure AlN. Our micro-machined energy harvester exploiting the developed (MgHf)0.12Al0.88N films provided the highest normalized power density (NPD) of 12.04 mW.cm-3.g-2 among the state-of-the-art piezoelectric VEHs. The results opened the way for the development of high-performance VEHs using in wireless sensors network.
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U2 - 10.1088/1742-6596/1052/1/012018
DO - 10.1088/1742-6596/1052/1/012018
M3 - Conference article
AN - SCOPUS:85051341237
SN - 1742-6588
VL - 1052
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012018
T2 - 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017
Y2 - 14 November 2017 through 17 November 2017
ER -