High-performance wet cleaning technology

Hiroshi Morita, Akinobu Teramoto, Hitoshi Morinaga, Senri Ojima, Kenichi Mitsumori

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing
Publisher	CRC Press
Pages	61-64
Number of pages	4
ISBN (Electronic)	9781315221076
ISBN (Print)	9780849335433
Publication status	Published - 2016 Apr 19

ASJC Scopus subject areas

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AU - Mitsumori, Kenichi

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