High-performance wet cleaning technology

Hiroshi Morita, Akinobu Teramoto, Hitoshi Morinaga, Senri Ojima, Kenichi Mitsumori

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationScientific Wet Process Technology for Innovative LSI/FPD Manufacturing
PublisherCRC Press
Number of pages4
ISBN (Electronic)9781315221076
ISBN (Print)9780849335433
Publication statusPublished - 2016 Apr 19

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Engineering(all)
  • Environmental Science(all)

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