@inproceedings{88e3ee799f5445f58a5d759ddbbc97b7,
title = "High quantum efficiency 200-1000 nm spectral response photodiodes with on-chip multiple high transmittance optical layers",
abstract = "High quantum efficiency (QE) 200-1000 nm spectral response photodiodes using on-chip multiple high transmittance optical layers are demonstrated for development of a high sensitivity linear photodiode array (PDA). In this paper, seven types of PDs with an optical layer each having a band-pass filter type transmittance are described. A surface photogenerated carrier drift layer is employed to improve internal QE and stability of sensitivity to UV-light. The average QE of 79% for 200-1000 nm and 84% for 200-380 nm were obtained for the fabricated PDs. In addition, after acceleration UV-light exposure, degradation of QE is below 15% and increment of dark current is less than double.",
keywords = "On-chip multiple optical layers, Photodiode, Spectroscopy",
author = "Yasumasa Koda and Rihito Kuroda and Shigetoshi Sugawa",
note = "Publisher Copyright: {\textcopyright} 2014 Crown.; 13th IEEE SENSORS Conference, SENSORS 2014 ; Conference date: 02-11-2014 Through 05-11-2014",
year = "2014",
month = dec,
day = "12",
doi = "10.1109/ICSENS.2014.6985340",
language = "English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "December",
pages = "1664--1667",
editor = "Arregui, {Francisco J.}",
booktitle = "IEEE SENSORS 2014, Proceedings",
address = "United States",
edition = "December",
}