High-reflection multilayer for wavelength range of 200-30 nm

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


Composite multilayers consisting of a top single layer and piled double layers with high reflectance through a 200-30 nm wavelength range have been designed and fabricated for normal incidence optical systems and the performance was checked in a 140-30 nm range. The normal incidence reflectance of SiC (top layer)-Y2O3/Mg (double layers) multilayer was more than 14% in a range of 40-30 nm which is much higher than those of W, and 20-40% above 50 nm which is comparable with that of W. The reflectance of SiC (top layer)-Mg/SiC (double layers) multilayer was a little lower than those values.

Original languageEnglish
Pages (from-to)333-336
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Publication statusPublished - 2001 Jul 21


  • Multilayer
  • Normal incidence
  • Reflectance
  • Reflection coating
  • Vacuum ultraviolet


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