High Resolution and High Speed Inspection Equipment for Mini-LED Substrates

Toshiro Yasuda, Kazuhisa Kobayashi, Yuichi Yamamoto, Hiroshi Hamori, Wei Cheng, Ryan Ge, Shigetoshi Sugawa

Research output: Contribution to journalConference articlepeer-review


A new mini LED substrate inspection equipment using a non-connected high-precision proximity capacitance image sensor system named as “EPIS” (Electrical Picture Inspection System) with one-unit pixel size of 12μm, the number of pixels of 1080 x 1080 and capacitance detection accuracy of 0.1aF has been developed. In this paper, detection results of a mini LED substrate using EPIS and the equipment are discussed.

Original languageEnglish
Pages (from-to)363-366
Number of pages4
JournalDigest of Technical Papers - SID International Symposium
Issue numberS1
Publication statusPublished - 2022
EventInternational Conference on Display Technology, ICDT 2022 - Fuzhou, China
Duration: 2022 Jul 92022 Jul 12


  • Defect Inspection Equipment
  • Micro-LED Substrates
  • Mini-LED Substrates
  • Proximity Capacitance Image Sensor

ASJC Scopus subject areas

  • Engineering(all)


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