TY - JOUR
T1 - High Resolution and High Speed Inspection Equipment for Mini-LED Substrates
AU - Yasuda, Toshiro
AU - Kobayashi, Kazuhisa
AU - Yamamoto, Yuichi
AU - Hamori, Hiroshi
AU - Cheng, Wei
AU - Ge, Ryan
AU - Sugawa, Shigetoshi
N1 - Publisher Copyright:
© 2022, John Wiley and Sons Inc. All rights reserved.
PY - 2022
Y1 - 2022
N2 - A new mini LED substrate inspection equipment using a non-connected high-precision proximity capacitance image sensor system named as “EPIS” (Electrical Picture Inspection System) with one-unit pixel size of 12μm, the number of pixels of 1080 x 1080 and capacitance detection accuracy of 0.1aF has been developed. In this paper, detection results of a mini LED substrate using EPIS and the equipment are discussed.
AB - A new mini LED substrate inspection equipment using a non-connected high-precision proximity capacitance image sensor system named as “EPIS” (Electrical Picture Inspection System) with one-unit pixel size of 12μm, the number of pixels of 1080 x 1080 and capacitance detection accuracy of 0.1aF has been developed. In this paper, detection results of a mini LED substrate using EPIS and the equipment are discussed.
KW - Defect Inspection Equipment
KW - Micro-LED Substrates
KW - Mini-LED Substrates
KW - Proximity Capacitance Image Sensor
UR - http://www.scopus.com/inward/record.url?scp=85141897641&partnerID=8YFLogxK
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U2 - 10.1002/sdtp.15949
DO - 10.1002/sdtp.15949
M3 - Conference article
AN - SCOPUS:85141897641
SN - 0097-966X
VL - 53
SP - 363
EP - 366
JO - Digest of Technical Papers - SID International Symposium
JF - Digest of Technical Papers - SID International Symposium
IS - S1
T2 - International Conference on Display Technology, ICDT 2022
Y2 - 9 July 2022 through 12 July 2022
ER -