High-resolution X-ray microbeam by using a Kirkpatrik-BaezType mirror at SPring-8

A. Takeuchi; Y. Suzuki; H. Takano

doi:10.1051/jp4:200300069

High-resolution X-ray microbeam by using a Kirkpatrik-BaezType mirror at SPring-8

A. Takeuchi, Y. Suzuki, H. Takano

Research output: Contribution to journal › Conference article › peer-review

7 Citations (Scopus)

Abstract

X-ray microbeam generated by a Kirkpatrik-Baez (KB) mirror optics with a set of two parabolic-shaped reflective surfaces was tested at an undulator beamline BL47XU of SPring-8. The KB mirror used in the experiment was fabricated by numerically-controlled polishing technique at Cannon Co. Ltd. Measured focal spot size at the x-ray energy of 8 keV in the vertical and the horizontal were 0.75 μm and 0.32 μm, respectively. The photon flux of the focal spot was 2 × 10¹⁰ [photons/ s/100 mA ring current]. Tantalum test pattern of the 0.2 μm line width was clearly observed with raster scan.

Original language	English
Pages (from-to)	235-238
Number of pages	4
Journal	Journal De Physique. IV : JP
Volume	104
DOIs	https://doi.org/10.1051/jp4:200300069
Publication status	Published - 2003 Mar
Externally published	Yes
Event	7th International Conference on X-Ray Microscopy - Grenoble, France Duration: 2002 Jul 28 → 2002 Aug 2

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1051/jp4:200300069

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title = "High-resolution X-ray microbeam by using a Kirkpatrik-BaezType mirror at SPring-8",

abstract = "X-ray microbeam generated by a Kirkpatrik-Baez (KB) mirror optics with a set of two parabolic-shaped reflective surfaces was tested at an undulator beamline BL47XU of SPring-8. The KB mirror used in the experiment was fabricated by numerically-controlled polishing technique at Cannon Co. Ltd. Measured focal spot size at the x-ray energy of 8 keV in the vertical and the horizontal were 0.75 μm and 0.32 μm, respectively. The photon flux of the focal spot was 2 × 1010 [photons/ s/100 mA ring current]. Tantalum test pattern of the 0.2 μm line width was clearly observed with raster scan.",

author = "A. Takeuchi and Y. Suzuki and H. Takano",

year = "2003",

month = mar,

doi = "10.1051/jp4:200300069",

language = "English",

volume = "104",

pages = "235--238",

journal = "European Physical Journal: Special Topics",

issn = "1951-6355",

publisher = "Springer Verlag",

note = "7th International Conference on X-Ray Microscopy ; Conference date: 28-07-2002 Through 02-08-2002",

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T1 - High-resolution X-ray microbeam by using a Kirkpatrik-BaezType mirror at SPring-8

AU - Takeuchi, A.

AU - Suzuki, Y.

AU - Takano, H.

PY - 2003/3

Y1 - 2003/3

N2 - X-ray microbeam generated by a Kirkpatrik-Baez (KB) mirror optics with a set of two parabolic-shaped reflective surfaces was tested at an undulator beamline BL47XU of SPring-8. The KB mirror used in the experiment was fabricated by numerically-controlled polishing technique at Cannon Co. Ltd. Measured focal spot size at the x-ray energy of 8 keV in the vertical and the horizontal were 0.75 μm and 0.32 μm, respectively. The photon flux of the focal spot was 2 × 1010 [photons/ s/100 mA ring current]. Tantalum test pattern of the 0.2 μm line width was clearly observed with raster scan.

AB - X-ray microbeam generated by a Kirkpatrik-Baez (KB) mirror optics with a set of two parabolic-shaped reflective surfaces was tested at an undulator beamline BL47XU of SPring-8. The KB mirror used in the experiment was fabricated by numerically-controlled polishing technique at Cannon Co. Ltd. Measured focal spot size at the x-ray energy of 8 keV in the vertical and the horizontal were 0.75 μm and 0.32 μm, respectively. The photon flux of the focal spot was 2 × 1010 [photons/ s/100 mA ring current]. Tantalum test pattern of the 0.2 μm line width was clearly observed with raster scan.

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DO - 10.1051/jp4:200300069

M3 - Conference article

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SN - 1951-6355

VL - 104

SP - 235

EP - 238

JO - European Physical Journal: Special Topics

JF - European Physical Journal: Special Topics

T2 - 7th International Conference on X-Ray Microscopy

Y2 - 28 July 2002 through 2 August 2002

ER -

High-resolution X-ray microbeam by using a Kirkpatrik-BaezType mirror at SPring-8

Abstract

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