Abstract
This paper presents a high-sensitive organic contaminants detecting method in clean room air. Using a Fourier Transform Infra-Red spectroscopy (FTIR), we can detect various chemical compounds including organic contaminants in a few minutes. In addition, by combining two efficient methods: Multiple Internal Reflection (MIR) and Cold Trap (CT), the sensitivity rate of detection chemical compounds rises drastically. By conducting experiments, it has been demonstrated that this sensitivity rate reaches to the order of ppb. This method will be used as an integral part of clean room air monitoring systems.
| Original language | English |
|---|---|
| Pages (from-to) | 469-472 |
| Number of pages | 4 |
| Journal | IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings |
| Publication status | Published - 2001 Nov 28 |
| Event | IEEE International Symposium on Semiconductor Manufacturing (ISSIM) 2001 - San Jose, CA, United States Duration: 2001 Oct 8 → 2001 Oct 10 |
Keywords
- Cold trap
- FTIR
- Multiple internal reflection
- Organic contamination
ASJC Scopus subject areas
- Engineering(all)