High-speed and large-amplitude resonant varifocal mirror

Takashi Sasaki; Takuro Kamada; Kazuhiro Hane

doi:10.20965/jrm.2020.p0344

High-speed and large-amplitude resonant varifocal mirror

Takashi Sasaki, Takuro Kamada, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Tohoku University

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumference supported type was obtained. The fabricated mirror could operate at approximately 450 kHz with axisymmetric deformation. The focal length was calculated to be ±28 mm at an applied total voltage amplitude of 150 V.

Original language	English
Pages (from-to)	344-350
Number of pages	7
Journal	Journal of Robotics and Mechatronics
Volume	32
Issue number	2
DOIs	https://doi.org/10.20965/jrm.2020.p0344
Publication status	Published - 2020

Keywords

High-quality factor
Laser scanning
Micro mirrors
Support loss
Varifocal mirrors

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10.20965/jrm.2020.p0344

Cite this

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title = "High-speed and large-amplitude resonant varifocal mirror",

abstract = "We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumference supported type was obtained. The fabricated mirror could operate at approximately 450 kHz with axisymmetric deformation. The focal length was calculated to be ±28 mm at an applied total voltage amplitude of 150 V.",

keywords = "High-quality factor, Laser scanning, Micro mirrors, Support loss, Varifocal mirrors",

author = "Takashi Sasaki and Takuro Kamada and Kazuhiro Hane",

note = "Funding Information: The development of the proposed device and measurements were conducted in Micro/Nano-Machining Research and Education Center in Tohoku University. This work was supported in part by the JSPS KAKENHI Grant Number JP19K04505. Publisher Copyright: {\textcopyright} 2020, Fuji Technology Press. All rights reserved.",

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doi = "10.20965/jrm.2020.p0344",

language = "English",

volume = "32",

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T1 - High-speed and large-amplitude resonant varifocal mirror

AU - Sasaki, Takashi

AU - Kamada, Takuro

AU - Hane, Kazuhiro

N1 - Funding Information: The development of the proposed device and measurements were conducted in Micro/Nano-Machining Research and Education Center in Tohoku University. This work was supported in part by the JSPS KAKENHI Grant Number JP19K04505. Publisher Copyright: © 2020, Fuji Technology Press. All rights reserved.

PY - 2020

Y1 - 2020

N2 - We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumference supported type was obtained. The fabricated mirror could operate at approximately 450 kHz with axisymmetric deformation. The focal length was calculated to be ±28 mm at an applied total voltage amplitude of 150 V.

AB - We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumference supported type was obtained. The fabricated mirror could operate at approximately 450 kHz with axisymmetric deformation. The focal length was calculated to be ±28 mm at an applied total voltage amplitude of 150 V.

KW - High-quality factor

KW - Laser scanning

KW - Micro mirrors

KW - Support loss

KW - Varifocal mirrors

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JO - Journal of Robotics and Mechatronics

JF - Journal of Robotics and Mechatronics

IS - 2

ER -

High-speed and large-amplitude resonant varifocal mirror

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