TY - JOUR
T1 - High-speed chemical imaging system based on front-side-illuminated LAPS
AU - Itabashi, Akinori
AU - Kosaka, Naoki
AU - Miyamoto, Ko Ichiro
AU - Wagner, Torsten
AU - Schöning, Michael J.
AU - Yoshinobu, Tatsuo
N1 - Funding Information:
This work was supported by JSPS Grant-in-Aid for Scientific Research (B) (contract no. 24310098 ). A part of this research was carried out at the Machine Shop Division of Fundamental Technology Center, Research Institute of Electrical Communication, Tohoku University.
PY - 2013
Y1 - 2013
N2 - The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the spatial distribution of specific ions on the sensing surface. The conventional chemical imaging system based on the light-addressable potentiometric sensor (LAPS), however, required a long time to obtain a chemical image, due to the slow mechanical scan of a single light beam. For high-speed imaging, a plurality of light beams modulated at different frequencies can be employed to measure the ion concentrations simultaneously at different locations on the sensor plate by frequency division multiplex (FDM). However, the conventional measurement geometry of back-side illumination limited the bandwidth of the modulation frequency required for FDM measurement, because of the low-pass filtering characteristics of carrier diffusion in the Si substrate. In this study, a high-speed chemical imaging system based on front-side-illuminated LAPS was developed, which achieved high-speed spatiotemporal recording of pH change at a rate of 70 frames per second.
AB - The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the spatial distribution of specific ions on the sensing surface. The conventional chemical imaging system based on the light-addressable potentiometric sensor (LAPS), however, required a long time to obtain a chemical image, due to the slow mechanical scan of a single light beam. For high-speed imaging, a plurality of light beams modulated at different frequencies can be employed to measure the ion concentrations simultaneously at different locations on the sensor plate by frequency division multiplex (FDM). However, the conventional measurement geometry of back-side illumination limited the bandwidth of the modulation frequency required for FDM measurement, because of the low-pass filtering characteristics of carrier diffusion in the Si substrate. In this study, a high-speed chemical imaging system based on front-side-illuminated LAPS was developed, which achieved high-speed spatiotemporal recording of pH change at a rate of 70 frames per second.
KW - Chemical imaging sensor
KW - Front-side illumination
KW - LAPS pH distribution
KW - Light-addressable potentiometric sensor
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U2 - 10.1016/j.snb.2013.03.016
DO - 10.1016/j.snb.2013.03.016
M3 - Article
AN - SCOPUS:84876147844
SN - 0925-4005
VL - 182
SP - 315
EP - 321
JO - Sensors and Actuators B: Chemical
JF - Sensors and Actuators B: Chemical
ER -