High-speed imaging by electro-magnetically actuated probe with dual spring

Dong Weon Lee, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


This paper describes a magnetically actuated cantilever with dual spring (cantilevered actuator and torsional cantilever) for a high-speed imaging of atomic force microscopy (AFM). A fabricated cantilever beam with a high resonant frequency is successfully actuated by electromagnetic force. A planar coil is placed on the free end of the cantilever beam and embedded in a groove formed on the silicon cantilever to get a large deflection. Static and dynamic mechanical characteristics of the fabricated probes have been measured. The experimental results of the mechanical properties are compared with the calculation results obtained from a finite element method. When flowing a current of ±10 mA, a static deflection of ±2 can be achieved by a cantilever with a length of 400 μm. The scanning speed of AFM is increased up to 1 mm/s by actuating the high resonant frequency cantilever in constant force mode.

Original languageEnglish
Pages (from-to)419-424
Number of pages6
JournalJournal of Microelectromechanical Systems
Issue number4
Publication statusPublished - 2000 Dec


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