High surface accuracy resonant varifocal mirror

Kenta Nakazawa, Takashi Sasaki, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review


Electrostatically actuated resonant varifocal mirrors were developed by bonding a silicon-on-insulator wafer and a glass wafer. Three different types of supporting fringes for the mirrors were tested to study the mirror's surface profiles by using the optical interference images. The surface profile deviation from the ideal parabolic shape was supported to 70 nm or less when the mirror's supporting fringe was made to be mechanically compliant.

Original languageEnglish
Pages (from-to)165-170
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Issue number5
Publication statusPublished - 2015 May 1


  • Frequency response
  • Resonant vibration
  • Surface accuracy
  • Varifocal mirror


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