High surface accuracy resonant varifocal mirror

Kenta Nakazawa; Takashi Sasaki; Kazuhiro Hane

doi:10.1541/ieejsmas.135.165

High surface accuracy resonant varifocal mirror

Kenta Nakazawa, Takashi Sasaki, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Tohoku University

Research output: Contribution to journal › Article › peer-review

Abstract

Electrostatically actuated resonant varifocal mirrors were developed by bonding a silicon-on-insulator wafer and a glass wafer. Three different types of supporting fringes for the mirrors were tested to study the mirror's surface profiles by using the optical interference images. The surface profile deviation from the ideal parabolic shape was supported to 70 nm or less when the mirror's supporting fringe was made to be mechanically compliant.

Original language	English
Pages (from-to)	165-170
Number of pages	6
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	135
Issue number	5
DOIs	https://doi.org/10.1541/ieejsmas.135.165
Publication status	Published - 2015 May 1

Keywords

Frequency response
Resonant vibration
Surface accuracy
Varifocal mirror

Access to Document

10.1541/ieejsmas.135.165

Cite this

@article{2f423b3e34a04d1c836635b6f121d3a0,

title = "High surface accuracy resonant varifocal mirror",

abstract = "Electrostatically actuated resonant varifocal mirrors were developed by bonding a silicon-on-insulator wafer and a glass wafer. Three different types of supporting fringes for the mirrors were tested to study the mirror's surface profiles by using the optical interference images. The surface profile deviation from the ideal parabolic shape was supported to 70 nm or less when the mirror's supporting fringe was made to be mechanically compliant.",

keywords = "Frequency response, Resonant vibration, Surface accuracy, Varifocal mirror",

author = "Kenta Nakazawa and Takashi Sasaki and Kazuhiro Hane",

note = "Publisher Copyright: {\textcopyright} 2015 The Institute of Electrical Engineers.",

year = "2015",

month = may,

day = "1",

doi = "10.1541/ieejsmas.135.165",

language = "English",

volume = "135",

pages = "165--170",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

number = "5",

}

TY - JOUR

T1 - High surface accuracy resonant varifocal mirror

AU - Nakazawa, Kenta

AU - Sasaki, Takashi

AU - Hane, Kazuhiro

PY - 2015/5/1

Y1 - 2015/5/1

N2 - Electrostatically actuated resonant varifocal mirrors were developed by bonding a silicon-on-insulator wafer and a glass wafer. Three different types of supporting fringes for the mirrors were tested to study the mirror's surface profiles by using the optical interference images. The surface profile deviation from the ideal parabolic shape was supported to 70 nm or less when the mirror's supporting fringe was made to be mechanically compliant.

AB - Electrostatically actuated resonant varifocal mirrors were developed by bonding a silicon-on-insulator wafer and a glass wafer. Three different types of supporting fringes for the mirrors were tested to study the mirror's surface profiles by using the optical interference images. The surface profile deviation from the ideal parabolic shape was supported to 70 nm or less when the mirror's supporting fringe was made to be mechanically compliant.

KW - Frequency response

KW - Resonant vibration

KW - Surface accuracy

KW - Varifocal mirror

UR - http://www.scopus.com/inward/record.url?scp=84929319789&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84929319789&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.135.165

DO - 10.1541/ieejsmas.135.165

M3 - Article

AN - SCOPUS:84929319789

SN - 1341-8939

VL - 135

SP - 165

EP - 170

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

IS - 5

ER -

High surface accuracy resonant varifocal mirror

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this