Abstract
We developed a scanning microwave microscope (SμM) designed for high-throughput electric-property screening as well as for rapid construction of electronic phase diagrams at low temperatures. As a sensor probe, we used a high-Q λ/4 coaxial cavity resonator to which a thin needle with ball-tip end was attached. The sensor module was mounted on the low-temperature XYZ stage, which allowed us to map out the change of resonance frequency and quality factor due to the local tip-sample interaction at low temperatures. From the measurements of combinatorial thin films, such as Ti 1-x Co x O 2-δ and Nd 0.9 Ca 0.1 Ba 2 Cu 3 O 7-δ (NCBCO), it was demonstrated that this SμM system has enough performance for the high-throughput characterization of sample conductance under variable temperature conditions.
Original language | English |
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Pages (from-to) | 2615-2621 |
Number of pages | 7 |
Journal | Applied Surface Science |
Volume | 252 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2006 Jan 21 |
Externally published | Yes |
Event | Proceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI - Duration: 2004 Dec 7 → 2004 Dec 10 |
Keywords
- Combinatorial materials science
- Conductivity
- Low-temperature scanning microwave microscope (LT-SμM)
- Superconductivity
- Ti Co o
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films