Highly (001)-oriented α-Al2O3 films prepared by laser chemical vapor deposition

Yu You; Akihiko Ito; Takashi Goto

doi:10.1016/j.matlet.2013.04.113

Highly (001)-oriented α-Al₂O₃ films prepared by laser chemical vapor deposition

Yu You, Akihiko Ito, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

(001)-oriented α-Al₂O₃ films were prepared on polycrystalline AlN substrates by laser chemical vapor deposition at deposition temperatures of 1373-1455 K. The (001) orientation degree increased from 36% to 90% with increasing vaporization temperature of the Al precursor from 438 to 453 K; the deposition rate also increased from 82 to 175 μm h^-1. The (001)-oriented α-Al₂O₃ films exhibited columnar growth, and hexagonal terraces of α-Al₂O₃ (001) plane were observed on the surface.

Original language	English
Pages (from-to)	11-13
Number of pages	3
Journal	Materials Letters
Volume	106
DOIs	https://doi.org/10.1016/j.matlet.2013.04.113
Publication status	Published - 2013

Keywords

Laser CVD
Microstructure
Oriented growth
α-AlO

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1016/j.matlet.2013.04.113

Cite this

@article{7ec4881687954ab39d519601d1c09aac,

title = "Highly (001)-oriented α-Al2O3 films prepared by laser chemical vapor deposition",

abstract = "(001)-oriented α-Al2O3 films were prepared on polycrystalline AlN substrates by laser chemical vapor deposition at deposition temperatures of 1373-1455 K. The (001) orientation degree increased from 36% to 90% with increasing vaporization temperature of the Al precursor from 438 to 453 K; the deposition rate also increased from 82 to 175 μm h-1. The (001)-oriented α-Al2O3 films exhibited columnar growth, and hexagonal terraces of α-Al2O3 (001) plane were observed on the surface.",

keywords = "Laser CVD, Microstructure, Oriented growth, α-AlO",

author = "Yu You and Akihiko Ito and Takashi Goto",

note = "Funding Information: This research was performed as part of the Rare Metal Substitute Materials Development Project of the New Energy and Industrial Technology Development Organization (NEDO). This research was also supported in part by the Japan Society for the Promotion of Science, Grant-in-Aid for Young Scientists (A) , 25709069 .",

year = "2013",

doi = "10.1016/j.matlet.2013.04.113",

language = "English",

volume = "106",

pages = "11--13",

journal = "Materials Letters",

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TY - JOUR

T1 - Highly (001)-oriented α-Al2O3 films prepared by laser chemical vapor deposition

AU - You, Yu

AU - Ito, Akihiko

AU - Goto, Takashi

N1 - Funding Information: This research was performed as part of the Rare Metal Substitute Materials Development Project of the New Energy and Industrial Technology Development Organization (NEDO). This research was also supported in part by the Japan Society for the Promotion of Science, Grant-in-Aid for Young Scientists (A) , 25709069 .

PY - 2013

Y1 - 2013

N2 - (001)-oriented α-Al2O3 films were prepared on polycrystalline AlN substrates by laser chemical vapor deposition at deposition temperatures of 1373-1455 K. The (001) orientation degree increased from 36% to 90% with increasing vaporization temperature of the Al precursor from 438 to 453 K; the deposition rate also increased from 82 to 175 μm h-1. The (001)-oriented α-Al2O3 films exhibited columnar growth, and hexagonal terraces of α-Al2O3 (001) plane were observed on the surface.

AB - (001)-oriented α-Al2O3 films were prepared on polycrystalline AlN substrates by laser chemical vapor deposition at deposition temperatures of 1373-1455 K. The (001) orientation degree increased from 36% to 90% with increasing vaporization temperature of the Al precursor from 438 to 453 K; the deposition rate also increased from 82 to 175 μm h-1. The (001)-oriented α-Al2O3 films exhibited columnar growth, and hexagonal terraces of α-Al2O3 (001) plane were observed on the surface.

KW - Laser CVD

KW - Microstructure

KW - Oriented growth

KW - α-AlO

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JF - Materials Letters

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