TY - GEN
T1 - Highly accurate management in dynamically changing fab
AU - Imaoka, K.
AU - Ishii, Y.
AU - Kikuchi, T.
AU - Sugawa, S.
AU - Nagahira, A.
PY - 2008
Y1 - 2008
N2 - Semiconductor fab capability improvement is usually discussed in the context of static conditions. This paper focuses on rapidly changing fab in the midst of capability improvement and describes the fab operations that maximize throughput while maintaining the cycle time in such a dynamic environment. Turn and Move are defined as parameters that indicate daily operation performance. The manufacturing process is divided into several segments where the Turn is maintained uniformly in each segment, while the increased Move capability is sequentially-allocated and shifted from one segment to the next, from input side to output side of each manufacturing process. The effectiveness of this method has been demonstrated in a NOR Flash Memory Fab.
AB - Semiconductor fab capability improvement is usually discussed in the context of static conditions. This paper focuses on rapidly changing fab in the midst of capability improvement and describes the fab operations that maximize throughput while maintaining the cycle time in such a dynamic environment. Turn and Move are defined as parameters that indicate daily operation performance. The manufacturing process is divided into several segments where the Turn is maintained uniformly in each segment, while the increased Move capability is sequentially-allocated and shifted from one segment to the next, from input side to output side of each manufacturing process. The effectiveness of this method has been demonstrated in a NOR Flash Memory Fab.
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M3 - Conference contribution
AN - SCOPUS:79952548703
SN - 9784990413828
T3 - IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
SP - 33
EP - 36
BT - 2008 International Symposium on Semiconductor Manufacturing, ISSM 2008
T2 - 2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008
Y2 - 27 October 2008 through 29 October 2008
ER -