TY - GEN
T1 - Highly integrated cantilever with light emitting diode, channel waveguide, aperture, and photodiode for scanning near-field optical microscope
AU - Sasaki, M.
AU - Tanaka, K.
AU - Hane, K.
PY - 2000
Y1 - 2000
N2 - In this study, a highly integrated cantilever for a scanning near-field optical microscope (SNOM) is described. All components necessary for the SNOM system (light emitting diode (LED) for light source, channel waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.
AB - In this study, a highly integrated cantilever for a scanning near-field optical microscope (SNOM) is described. All components necessary for the SNOM system (light emitting diode (LED) for light source, channel waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.
UR - http://www.scopus.com/inward/record.url?scp=84952040348&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84952040348&partnerID=8YFLogxK
U2 - 10.1109/IMNC.2000.872666
DO - 10.1109/IMNC.2000.872666
M3 - Conference contribution
AN - SCOPUS:84952040348
T3 - Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000
SP - 146
EP - 147
BT - Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - International Microprocesses and Nanotechnology Conference, MNC 2000
Y2 - 11 July 2000 through 13 July 2000
ER -