TY - JOUR
T1 - Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters [Correspondence]
AU - Minh, Le Van
AU - Hara, Motoaki
AU - Yokoyama, Tsuyoshi
AU - Nishihara, Tokihiro
AU - Ueda, Masanori
AU - Kuwano, Hiroki
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/11
Y1 - 2015/11
N2 - The first MgZr co-doped AlN-based vibrational energy harvester (VEH) is presented. (MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 μW was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s2, and 1.1 MΩ, respectively. Normalized power density was 8.1 kW.g-2.m-3. This was one of the highest values among the currently available piezoelectric VEHs.
AB - The first MgZr co-doped AlN-based vibrational energy harvester (VEH) is presented. (MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 μW was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s2, and 1.1 MΩ, respectively. Normalized power density was 8.1 kW.g-2.m-3. This was one of the highest values among the currently available piezoelectric VEHs.
UR - http://www.scopus.com/inward/record.url?scp=84959471852&partnerID=8YFLogxK
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U2 - 10.1109/TUFFC.2014.006750
DO - 10.1109/TUFFC.2014.006750
M3 - Article
AN - SCOPUS:84959471852
SN - 0885-3010
VL - 62
SP - 2005
EP - 2008
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 11
M1 - 7321707
ER -