Highly reliable fitting for gas delivery systems

Nobukazu Ikeda; Yasuyuki Shirai; Tadahiro Ohmi; Michio Yamaji

doi:10.1116/1.580966

Highly reliable fitting for gas delivery systems

Nobukazu Ikeda, Yasuyuki Shirai, Tadahiro Ohmi, Michio Yamaji

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

After confirming the basic characteristics of two types of metal gasket fittings, which are used in construction of ultrapure gas delivery systems for semiconductor manufacturing, it is noticed that the pipe usually twists at the time the fitting is tightened. This may be the possible cause of an external leak, therefore a twist leak test was undertaken to confirm the reliability of the seal during assembly. As a result, it was found that one type of fitting leaked and another type of fitting did not leak. This later type did not leak (leak rate is less than 2.98X10^-16 Pa m³/s) even after 70° of twisting.

Original language	English
Pages (from-to)	181-187
Number of pages	7
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	16
Issue number	1
DOIs	https://doi.org/10.1116/1.580966
Publication status	Published - 1998

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10.1116/1.580966

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abstract = "After confirming the basic characteristics of two types of metal gasket fittings, which are used in construction of ultrapure gas delivery systems for semiconductor manufacturing, it is noticed that the pipe usually twists at the time the fitting is tightened. This may be the possible cause of an external leak, therefore a twist leak test was undertaken to confirm the reliability of the seal during assembly. As a result, it was found that one type of fitting leaked and another type of fitting did not leak. This later type did not leak (leak rate is less than 2.98X10-16 Pa m3/s) even after 70° of twisting.",

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AU - Ikeda, Nobukazu

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AU - Ohmi, Tadahiro

AU - Yamaji, Michio

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Highly reliable fitting for gas delivery systems

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