Highly sensitive coplanar line thin-film sensor using SrTiO film

Hiroaki Uetake; Toshiya Kawakami; Shin Yabukami; Tetsuya Ozawa; Nobukiyo Kobayashi; Ken Ichi Arai

doi:10.1109/TMAG.2014.2331676

Highly sensitive coplanar line thin-film sensor using SrTiO film

Hiroaki Uetake, Toshiya Kawakami, Shin Yabukami, Tetsuya Ozawa, Nobukiyo Kobayashi, Ken Ichi Arai

MEN - Biomedical Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr₃₃Ti₁₆O₅₁) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO₂ film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.

Original language	English
Article number	6971665
Journal	IEEE Transactions on Magnetics
Volume	50
Issue number	11
DOIs	https://doi.org/10.1109/TMAG.2014.2331676
Publication status	Published - 2014 Nov 1

Keywords

Coplanar line
SrTi film
thin-film sensor

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10.1109/TMAG.2014.2331676

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title = "Highly sensitive coplanar line thin-film sensor using SrTiO film",

abstract = "A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr33Ti16O51) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.",

keywords = "Coplanar line, SrTi film, thin-film sensor",

author = "Hiroaki Uetake and Toshiya Kawakami and Shin Yabukami and Tetsuya Ozawa and Nobukiyo Kobayashi and Arai, {Ken Ichi}",

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AU - Uetake, Hiroaki

AU - Kawakami, Toshiya

AU - Yabukami, Shin

AU - Ozawa, Tetsuya

AU - Kobayashi, Nobukiyo

AU - Arai, Ken Ichi

PY - 2014/11/1

Y1 - 2014/11/1

N2 - A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr33Ti16O51) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.

AB - A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr33Ti16O51) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.

KW - Coplanar line

KW - SrTi film

KW - thin-film sensor

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Highly sensitive coplanar line thin-film sensor using SrTiO film

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Keywords

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