@inproceedings{9d0eb473cf0c466c9620577df58e9904,
title = "Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection",
abstract = "This paper reports a nanomechanical gas sensor using stress concentration at a piezoresistor. The sensor consist of a functional polymer embedded into Si comb and a Si cantilever with the piezoresistor at the support. The composite membrane generates a stress depending on absorption of gas species. The stress is converted via the lateral deflection of the cantilever to the enhanced strain of the piezoresistor at the support part of the cantilever. The difference in the stiffness of the cantilever and the piezoresistive part induces a stress concentration. The proposed design gives approximately 20 times higher sensitivity than other conventional sensors, and ΔR/R of the final design for 1%RH humidity change is estimated to be ΔR/R = 2.34×10-3. The sensitivity to humidity of the fabricated sensor is 3.92×10-5 /%RH and this sensor can distinguish acetone and ethanol.",
keywords = "Cantilever, Gas sensor, Lateral deflection, Piezoresistor, Polymer",
author = "Zhuqing Wang and Takumi Hokama and Masaya Toda and Mai Yamazaki and Krzysztof Moorthi and Takahito Ono",
year = "2019",
month = jun,
doi = "10.1109/TRANSDUCERS.2019.8808616",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2107--2109",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
note = "20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",
}