TY - JOUR
T1 - Highly sensitive trace moisture ball surface acoustic wave sensor using SiOx film
AU - Hagihara, Satoshi
AU - Tsuji, Toshihiro
AU - Oizumi, Toru
AU - Takeda, Nobuo
AU - Akao, Shingo
AU - Ohgi, Tsuneo
AU - Takayanagi, Kosuke
AU - Yanagisawa, Takayuki
AU - Nakaso, Noritaka
AU - Tsukahara, Yusuke
AU - Yamanaka, Kazushi
PY - 2014/7
Y1 - 2014/7
N2 - Regarding the gases for the manufacturing process of semiconductor devices, fast and sensitive sensors are needed to control trace moisture to less than 1 μmol/mol. A ball surface acoustic wave (SAW) sensor is promising technology for this purpose. In this study, we verify the response of a sol-gel SiOx film-coated ball SAW sensor to extremely low-concentration moisture using a cavity ring down spectroscopy (CRDS), the most sensitive commercially available moisture sensor, as a reference sensor. We clearly measured 17nmol/mol moisture by developing a sensor cell using metal O-rings reducing the leakage of moisture. The response time from 390 to 790 nmol/mol was one tenth of that for the CRDS, and the detection limit was estimated to be as low as 0.2 nmol/mol.
AB - Regarding the gases for the manufacturing process of semiconductor devices, fast and sensitive sensors are needed to control trace moisture to less than 1 μmol/mol. A ball surface acoustic wave (SAW) sensor is promising technology for this purpose. In this study, we verify the response of a sol-gel SiOx film-coated ball SAW sensor to extremely low-concentration moisture using a cavity ring down spectroscopy (CRDS), the most sensitive commercially available moisture sensor, as a reference sensor. We clearly measured 17nmol/mol moisture by developing a sensor cell using metal O-rings reducing the leakage of moisture. The response time from 390 to 790 nmol/mol was one tenth of that for the CRDS, and the detection limit was estimated to be as low as 0.2 nmol/mol.
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U2 - 10.7567/JJAP.53.07KD08
DO - 10.7567/JJAP.53.07KD08
M3 - Article
AN - SCOPUS:84903745453
SN - 0021-4922
VL - 53
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 7 SPEC. ISSUE
M1 - 07KD08
ER -