TY - JOUR
T1 - Hollow fiber delivery of ArF and KrF excimer laser light
AU - Matsuura, Yuji
AU - Miyagi, Mitsunobu
PY - 1999
Y1 - 1999
N2 - For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.
AB - For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.
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U2 - 10.1117/12.346704
DO - 10.1117/12.346704
M3 - Conference article
AN - SCOPUS:0032668178
SN - 0277-786X
VL - 3596
SP - 2
EP - 7
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Proceedings of the 1999 Specialty Fiber Optics for Medical Applications
Y2 - 24 January 1999 through 25 January 1999
ER -