Hollow fiber delivery of ArF and KrF excimer laser light

Yuji Matsuura, Mitsunobu Miyagi

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)


For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.

Original languageEnglish
Pages (from-to)2-7
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1999
EventProceedings of the 1999 Specialty Fiber Optics for Medical Applications - San Jose, CA, USA
Duration: 1999 Jan 241999 Jan 25


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