To improve the damage threshold of hollow optical waveguides for transmitting Q-switched Nd:YAG laser pulses, we optimize the metallization processes for the inner coating of fibers. For silver-coated hollow fiber as the base, second, and third Nd:YAG lasers, drying silver films at a moderate temperature and with inert gas flow is found to be effective. By using this drying process, the resistance to high-peak-power optical pulse radiation is drastically improved for fibers fabricated with and without the sensitizing process. The maximum peak power transmitted in the fiber is greater than 20 MW. To improve the energy threshold of aluminum-coated hollow fibers for the fourth and fifth harmonics of Nd:YAG lasers, a thin silver film is added between the aluminum film and the glass substrate to increase adhesion of the aluminum coating. By using this primer layer, the power threshold improves to 3 MW for the fourth harmonics of a Q-switched Nd:YAG laser light.