Hollow optical fibers for ultraviolet and vacuum ultraviolet light

Yuji Matsuura, Mitsunobu Miyagi

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)


Hollow optical fibers composed of glass capillary tubing with an inner coating of aluminum thin film are fabricated for delivery of ultraviolet and vacuum ultraviolet light. The aluminum film is formed by a chemical vapor deposition method employing a metalorganic aluminum as a precursor. Transmission properties of the aluminum-coated hollow fibers are evaluated with ArF- and F2-excimer lasers. Spectroscopy measurement in the vacuum ultraviolet region is also performed.

Original languageEnglish
Pages (from-to)1430-1434
Number of pages5
JournalIEEE Journal of Selected Topics in Quantum Electronics
Issue number6
Publication statusPublished - 2004 Nov


  • Excimer lasers
  • Hollow optical fibers
  • Optical fiber fabrication
  • Ultraviolet spectroscopy


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