TY - JOUR
T1 - Hydrogen desorption rate and surface hydrogen coverage during isothermal annealing for Si2H6-adsorbed Si(100) surfaces
AU - Horie, Tetsuhiro
AU - Takakuwa, Yuji
AU - Yamaguchi, Tetsuji
AU - Miyamoto, Nobuo
PY - 1994/3/1
Y1 - 1994/3/1
N2 - The hydrogen desorption kinetics were investigated from the viewpoint of hydrogen-unoccupied site distributed on Si2H6-adsorbed Si(100) surfaces during isothermal annealing. The surface electronic state due to Si dimer dangling bonds was observed in situ by ultraviolet photoelectron spectroscopy. The hydrogen desorption was found to be a first-order reaction with an small activation energy of 21.9 kcal/mol, in comparison to the value obtained by thermal desorption spectroscopy (TDS), 47-58 kcal/mol. To interpret this discrepancy, we proposed a desorption reaction model, in which H2 formation from a paired monohydride on a dimer, which proceeds dominantly during isothermal disorption, is disturbed by dimer Si-Si bond breaking due to rapid temperature elevating in TDS, and therefore an additional energy for hydrogen to hop between resultant isolated monohydrides and form dihydride, 34.5±4.6 kcal/mol, is necessary in TDS for H2 desorption.
AB - The hydrogen desorption kinetics were investigated from the viewpoint of hydrogen-unoccupied site distributed on Si2H6-adsorbed Si(100) surfaces during isothermal annealing. The surface electronic state due to Si dimer dangling bonds was observed in situ by ultraviolet photoelectron spectroscopy. The hydrogen desorption was found to be a first-order reaction with an small activation energy of 21.9 kcal/mol, in comparison to the value obtained by thermal desorption spectroscopy (TDS), 47-58 kcal/mol. To interpret this discrepancy, we proposed a desorption reaction model, in which H2 formation from a paired monohydride on a dimer, which proceeds dominantly during isothermal disorption, is disturbed by dimer Si-Si bond breaking due to rapid temperature elevating in TDS, and therefore an additional energy for hydrogen to hop between resultant isolated monohydrides and form dihydride, 34.5±4.6 kcal/mol, is necessary in TDS for H2 desorption.
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U2 - 10.1016/0022-0248(94)90437-5
DO - 10.1016/0022-0248(94)90437-5
M3 - Article
AN - SCOPUS:0028383183
SN - 0022-0248
VL - 136
SP - 344
EP - 348
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 1-4
ER -