@inproceedings{558bc13d716a4fd59360429b9274ff5a,
title = "IDT-based Acoustic Wave Devices Using Ultrathin Lithium Niobate and Lithium Tantalate",
abstract = "Ultrathin lithium niobite (LN) and lithium tantalate (LT) have opened a new era of acoustic wave devices. The performances such as impedance ratio, bandwidth and temperature stability of new types of devices are incredibly high compared with those of conventional ones. The RD is showing a kind of boom in both industry and academia. In this paper, plate wave devices and HAL (Hetero Acoustic Layer) SAW (surface acoustic wave) devices using ultrathin LN or LT developed by the authors' group are described.",
keywords = "A1 mode, HAL SAW, LSAW, plate wave, SAW, SH0 mode",
author = "Shuji Tanaka and Michio Kadota",
note = "Funding Information: This study was partly supported by MIC SCOPE No. 95002001 and SME “Supporting Industry Program”. Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020 ; Conference date: 19-07-2020 Through 23-07-2020",
year = "2020",
month = jul,
doi = "10.1109/IFCS-ISAF41089.2020.9234811",
language = "English",
series = "IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings",
address = "United States",
}