TY - GEN
T1 - Imaging detection of ethanol vapor by scanning photo-induced impedance microscopy with suspended-gate structure
AU - Wang, Mengyun
AU - Truong, Hoang Anh
AU - Werner, Carl Frederik
AU - Miyamoto, Ko Ichiro
AU - Yoshinobu, Tatsuo
N1 - Funding Information:
This work was supported by JSPS KAKENHI Grant Number 17H03074. The authors also highly appreciate the financial support by Amano Institute of Technology.
Publisher Copyright:
© 2019 IEEE.
PY - 2019/5
Y1 - 2019/5
N2 - Scanning photo-induced impedance microscopy (SPIM) is an imaging technique for the investigation of impedances on the insulating surface of a semiconductor substrate, based on the monitoring of a photocurrent signal generated by a modulated light. In this research, a gas-sensitive SPIM sensor with a suspended-gate structure is presented, to detect local impedance changes of a sensing film on the sensor surface in response to ethanol vapor. Thanks to the light-Addressability of SPIM, a spatially resolved photocurrent signal is captured and converted into 2-dimensional images for the observation of local impedance changes arising from the interaction between ethanol vapor and a SnO2 film at room temperature. Especially, the proposed gas-imaging sensor has a field-effect structure with an air gap to form a suspended-gate structure, resulting in an electrode contactless platform, which makes it possible to integrate multiple sensing elements on one single chip surface to detect gas mixtures without the need of complex wiring in the future.
AB - Scanning photo-induced impedance microscopy (SPIM) is an imaging technique for the investigation of impedances on the insulating surface of a semiconductor substrate, based on the monitoring of a photocurrent signal generated by a modulated light. In this research, a gas-sensitive SPIM sensor with a suspended-gate structure is presented, to detect local impedance changes of a sensing film on the sensor surface in response to ethanol vapor. Thanks to the light-Addressability of SPIM, a spatially resolved photocurrent signal is captured and converted into 2-dimensional images for the observation of local impedance changes arising from the interaction between ethanol vapor and a SnO2 film at room temperature. Especially, the proposed gas-imaging sensor has a field-effect structure with an air gap to form a suspended-gate structure, resulting in an electrode contactless platform, which makes it possible to integrate multiple sensing elements on one single chip surface to detect gas mixtures without the need of complex wiring in the future.
KW - ethanol vapor
KW - gas sensor
KW - impedance imaging
KW - SnO
KW - SPIM
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U2 - 10.1109/ISOEN.2019.8823159
DO - 10.1109/ISOEN.2019.8823159
M3 - Conference contribution
AN - SCOPUS:85072952049
T3 - ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings
BT - ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019
Y2 - 26 May 2019 through 29 May 2019
ER -