TY - GEN
T1 - Imaging of acoustic emission from vibrating micro/nano structures
AU - Ono, Takahito
AU - Kim, Sang Jin
AU - Esashi, Masayoshi
PY - 2006
Y1 - 2006
N2 - In this paper, a novel imaging technique of acoustic emission from vibrating micro- and nano-structures is proposed and demonstrated for characterizing their mechanical energy losses via ambient air. A thermal probe is employed for the measurement of particle velocity involved in the acoustic emission. Imaging is obtained with scanning the vibrating sample under the thermal probe, which exhibits the geometry dependence on acoustic emission profile. Also it is found that strong acoustic emission is emitted from a mechanical detect formed on the vibrating beam.
AB - In this paper, a novel imaging technique of acoustic emission from vibrating micro- and nano-structures is proposed and demonstrated for characterizing their mechanical energy losses via ambient air. A thermal probe is employed for the measurement of particle velocity involved in the acoustic emission. Imaging is obtained with scanning the vibrating sample under the thermal probe, which exhibits the geometry dependence on acoustic emission profile. Also it is found that strong acoustic emission is emitted from a mechanical detect formed on the vibrating beam.
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M3 - Conference contribution
AN - SCOPUS:33750108322
SN - 0780394755
SN - 9780780394759
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 242
EP - 245
BT - 19th IEEE International Conference on Micro Electro Mechanical Systems
T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems
Y2 - 22 January 2006 through 26 January 2006
ER -