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Impact of light-element impurities on crystalline defect generation in silicon wafer
Tomihisa Tachibana, Takashi Sameshima, Takuto Kojima, Koji Arafune, Koichi Kakimoto, Yoshiji Miyamura, Hirofumi Harada, Takashi Sekiguchi, Yoshio Ohshita, Atsushi Ogura
Research output: Contribution to journal › Article › peer-review
1
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(Scopus)