Impact of new approach to improve MOSFETs performance with ultrathin gate insulator

Weitao Cheng, Akinobu Teramoto, Tadahiro Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, we focus on the difference behavior of the gate-channel capacitance (Cgc) characteristics in the inversion-mode (IM) and the accumulation-mode (AM) SOI MOSFETs. We experimentally demonstrate that the gate-channel capacitance in the AM MOS device is obviously larger than that in IM MOS device using the same gate insulator on the same wafer. The increase of the Cgc in AM MOSFETs is much more remarkable as downscaling the gate insulator due to the different inversion and accumulation layer quantization effect and poly-Si gate depletion effect. As the result, the current drivability has been obviously improved in the AM MOSFETs resulted from its enhanced gate-channel capacitance compared with conventional IM MOSFETs.

Original languageEnglish
Title of host publicationECS Transactions - Silicon-on-Insulator Technology and Devices 14 - 215th Meeting of the Electrochemical Society
PublisherElectrochemical Society Inc.
Pages65-70
Number of pages6
Edition4
ISBN (Electronic)9781607680628
ISBN (Print)9781566777124
DOIs
Publication statusPublished - 2009
Externally publishedYes
Event14th International Symposium on Silicon-On-Insulator Technology and Devices - 215th Meeting of the Electrochemical Society - San Francisco, CA, United States
Duration: 2009 May 242009 May 29

Publication series

NameECS Transactions
Number4
Volume19
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

Other14th International Symposium on Silicon-On-Insulator Technology and Devices - 215th Meeting of the Electrochemical Society
Country/TerritoryUnited States
CitySan Francisco, CA
Period09/5/2409/5/29

ASJC Scopus subject areas

  • Engineering(all)

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