Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

R. Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

15 Citations (Scopus)

Abstract

This paper describes improvements made to a single-crystal mirror actuated electrostatically by terraced electrodes with a high-aspect ratio torsion spring. The improvements are reduced mirror pitch, increased mirror size, and higher stability from the electrical viewpoint.

Original languageEnglish
Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages153-154
Number of pages2
ISBN (Electronic)078037830X, 9780780378308
DOIs
Publication statusPublished - 2003
Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
Duration: 2003 Aug 182003 Aug 21

Publication series

Name2003 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference2003 IEEE/LEOS International Conference on Optical MEMS
Country/TerritoryUnited States
CityWaikoloa
Period03/8/1803/8/21

Keywords

  • Collimators
  • Crystallization
  • Electrodes
  • Fluctuations
  • Micromechanical devices
  • Mirrors
  • Optical arrays
  • Optical switches
  • Springs
  • Stability

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