Improved spray coating of photoresist for three-dimensional photolithography over deep structure

Vijay Kumar Singh; Minoru Sasaki; Yoshihiko Watanabe; Masato Kawakita; Hiroki Hayashi; Kazuhiro Hane

doi:10.1109/imnc.2004.245665

Improved spray coating of photoresist for three-dimensional photolithography over deep structure

Vijay Kumar Singh, Minoru Sasaki, Yoshihiko Watanabe, Masato Kawakita, Hiroki Hayashi, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2004
Publisher	The Japan Society of Applied Physics
Pages	306-307
Number of pages	2
ISBN (Print)	4990247205, 9784990247201
DOIs	https://doi.org/10.1109/imnc.2004.245665
Publication status	Published - 2004
Event	2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan Duration: 2004 Oct 26 → 2004 Oct 29

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference	2004 International Microprocesses and Nanotechnology Conference
Country/Territory	Japan
City	Osaka
Period	04/10/26 → 04/10/29

Access to Document

10.1109/imnc.2004.245665

Cite this

Singh, V. K., Sasaki, M., Watanabe, Y., Kawakita, M., Hayashi, H., & Hane, K. (2004). Improved spray coating of photoresist for three-dimensional photolithography over deep structure. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 306-307). Article 29B-9-2 (Digest of Papers - Microprocesses and Nanotechnology 2004). The Japan Society of Applied Physics. https://doi.org/10.1109/imnc.2004.245665

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title = "Improved spray coating of photoresist for three-dimensional photolithography over deep structure",

author = "Singh, {Vijay Kumar} and Minoru Sasaki and Yoshihiko Watanabe and Masato Kawakita and Hiroki Hayashi and Kazuhiro Hane",

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language = "English",

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publisher = "The Japan Society of Applied Physics",

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Singh, VK, Sasaki, M, Watanabe, Y, Kawakita, M, Hayashi, H & Hane, K 2004, Improved spray coating of photoresist for three-dimensional photolithography over deep structure. in Digest of Papers - Microprocesses and Nanotechnology 2004., 29B-9-2, Digest of Papers - Microprocesses and Nanotechnology 2004, The Japan Society of Applied Physics, pp. 306-307, 2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, 04/10/26. https://doi.org/10.1109/imnc.2004.245665

Improved spray coating of photoresist for three-dimensional photolithography over deep structure. / Singh, Vijay Kumar; Sasaki, Minoru; Watanabe, Yoshihiko et al.
Digest of Papers - Microprocesses and Nanotechnology 2004. The Japan Society of Applied Physics, 2004. p. 306-307 29B-9-2 (Digest of Papers - Microprocesses and Nanotechnology 2004).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Improved spray coating of photoresist for three-dimensional photolithography over deep structure

AU - Singh, Vijay Kumar

AU - Sasaki, Minoru

AU - Watanabe, Yoshihiko

AU - Kawakita, Masato

AU - Hayashi, Hiroki

AU - Hane, Kazuhiro

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M3 - Conference contribution

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SN - 4990247205

SN - 9784990247201

T3 - Digest of Papers - Microprocesses and Nanotechnology 2004

SP - 306

EP - 307

BT - Digest of Papers - Microprocesses and Nanotechnology 2004

PB - The Japan Society of Applied Physics

T2 - 2004 International Microprocesses and Nanotechnology Conference

Y2 - 26 October 2004 through 29 October 2004

ER -

Singh VK, Sasaki M, Watanabe Y, Kawakita M, Hayashi H, Hane K. Improved spray coating of photoresist for three-dimensional photolithography over deep structure. In Digest of Papers - Microprocesses and Nanotechnology 2004. The Japan Society of Applied Physics. 2004. p. 306-307. 29B-9-2. (Digest of Papers - Microprocesses and Nanotechnology 2004). doi: 10.1109/imnc.2004.245665

Improved spray coating of photoresist for three-dimensional photolithography over deep structure

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