Improved surface morphology in GaN homoepitaxy by NH 3-source molecular-beam epitaxy

T. Koida, Y. Uchinuma, J. Kikuchi, K. R. Wang, M. Terazaki, T. Onuma, J. F. Keading, R. Sharma, S. Nakamura, S. F. Chichibu

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2 Citations (Scopus)


GaN homoepitaxial layers of improved surface morphology were studied by a NH 3-source molecular beam epitaxy method. The surface flatness was maintained by depositing the 'flux-modulated' GaN prior to the high-temperature growth. The results show that, proper feeding of reactive NH 3 and the insertion of pregrowth FM-GaN improve the surface morphology, Hall mobility, and PL qualities of GaN homoepitaxial layers grown by NH 3-MBE on the GaN/(0001) Al 2O 3. It was also found that the increased feeding of thermally activated NH 3 on the growing surface greatly reduced the surface roughness of the epilayers.

Original languageEnglish
Pages (from-to)2158-2164
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number4
Publication statusPublished - 2004 Jul


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