Improvement of AI-polar AIN layer quality by three-stage flow-modulation metalorganic chemical vapor deposition

Misaichi Takeuchi, Shin Ooishi, Takumi Ohtsuka, Tomohiro Maegawa, Takahiro Koyama, Shigefusa F. Chichibu, Yoshinobu Aoyagi

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25 Citations (Scopus)

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