TY - GEN
T1 - Improvement of an air-bearing displacement sensor with nanometric resolution
AU - Ito, So
AU - Lee, Kang Won
AU - Shimizu, Yuki
AU - Gao, Wei
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - A contact stylus-type displacement sensor is proposed for a surface form measurement of micro-structures. The stylus is supported by an air-bearing, thus it can be moved smoothly without friction between the stylus and the air-bearing. In order to reduce the measurement force, a novel controlling technique of a contact force has been developed. During the measurement one edge of the stylus is maintained contact with the measured surface by its own weight. Another end of the stylus is connected with a counter weight by a string and the stylus is hanging on the string in order to reduce the contact force between the edge of the stylus and the measured surface. Measuring force is estimated to confirm the effectiveness of the counter weight. Surface measurement of a steel ball is carried out using the developed air-bearing displacement sensor.
AB - A contact stylus-type displacement sensor is proposed for a surface form measurement of micro-structures. The stylus is supported by an air-bearing, thus it can be moved smoothly without friction between the stylus and the air-bearing. In order to reduce the measurement force, a novel controlling technique of a contact force has been developed. During the measurement one edge of the stylus is maintained contact with the measured surface by its own weight. Another end of the stylus is connected with a counter weight by a string and the stylus is hanging on the string in order to reduce the contact force between the edge of the stylus and the measured surface. Measuring force is estimated to confirm the effectiveness of the counter weight. Surface measurement of a steel ball is carried out using the developed air-bearing displacement sensor.
KW - Air-bearing displacement sensor
KW - Low loading measurement
KW - On-machine measurement
KW - Surface profile measurement
UR - http://www.scopus.com/inward/record.url?scp=84870608668&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84870608668&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.523-524.945
DO - 10.4028/www.scientific.net/KEM.523-524.945
M3 - Conference contribution
AN - SCOPUS:84870608668
SN - 9783037855096
T3 - Key Engineering Materials
SP - 945
EP - 950
BT - Emerging Technology in Precision Engineering XIV
PB - Trans Tech Publications Ltd
T2 - 14th International Conference on Precision Engineering, ICPE 2012
Y2 - 8 November 2012 through 10 November 2012
ER -