TY - JOUR
T1 - Improvement of spatial resolution of a laser-scanning ph-imaging sensor
AU - Nakao, Motoi
AU - Yoshinobu, Tatsuo
AU - Iwasaki, Hiroshi
PY - 1994/3
Y1 - 1994/3
N2 - We investigated the spatial resolution of a laser-scanning semiconductor-based pH-imaging sensor both experimentally and theoretically. A spatial resolution better than 100 µ m was obtained by thinning the Si substrate to 100 µ m. The simulation results on the spatial resolution based on a carrier diffusion model agreed well with those obtained by experiment. From the simulation results, we also predicted the optimal choice of parameters of Si substrate (thickness, doping, etc.) for the pH-imaging sensor.
AB - We investigated the spatial resolution of a laser-scanning semiconductor-based pH-imaging sensor both experimentally and theoretically. A spatial resolution better than 100 µ m was obtained by thinning the Si substrate to 100 µ m. The simulation results on the spatial resolution based on a carrier diffusion model agreed well with those obtained by experiment. From the simulation results, we also predicted the optimal choice of parameters of Si substrate (thickness, doping, etc.) for the pH-imaging sensor.
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U2 - 10.1143/JJAP.33.L394
DO - 10.1143/JJAP.33.L394
M3 - Article
AN - SCOPUS:0028402638
SN - 0021-4922
VL - 33
SP - L394-L397
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 3
ER -