Improvements in temperature characteristics and bandwidth for ZnO/quartz structure with large coupling factor

Takaki Murata; Michio Kadota; Kenji Matsuda; Tetsuya Kimura; Ken Ya Hashimoto

doi:10.1143/JJAP.49.07HD25

Improvements in temperature characteristics and bandwidth for ZnO/quartz structure with large coupling factor

Takaki Murata, Michio Kadota, Kenji Matsuda, Tetsuya Kimura, Ken Ya Hashimoto

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Recently, several applications have required radio frequency filters with a narrow bandwidth and high attenuations. A ZnO film/quartz structure has a good potential to such a requirement. In this paper, we show the optimization of the ZnO/quartz structure to obtain a nearly zero temperature coefficient of frequency (TCF) while maximizing the electro-mechanical coupling coefficient (k₂). In the previous papers published by one of the authors about the ZnO/quartz structure, a nearly zero TCF with a small electro-mechanical coupling coefficient, or non-zero TCF with maximized k₂ was reported. However, both zero TCF and maximized k₂ have not yet been simultaneously obtained. In this study, we investigated the optimized structure by calculation and also confirmed it by measurement.

Original language	English
Article number	07HD25
Journal	Japanese journal of applied physics
Volume	49
Issue number	7 PART 2
DOIs	https://doi.org/10.1143/JJAP.49.07HD25
Publication status	Published - 2010 Jul
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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@article{7c483c73f50d40d2aaf6e66f4771eeee,

title = "Improvements in temperature characteristics and bandwidth for ZnO/quartz structure with large coupling factor",

abstract = "Recently, several applications have required radio frequency filters with a narrow bandwidth and high attenuations. A ZnO film/quartz structure has a good potential to such a requirement. In this paper, we show the optimization of the ZnO/quartz structure to obtain a nearly zero temperature coefficient of frequency (TCF) while maximizing the electro-mechanical coupling coefficient (k2). In the previous papers published by one of the authors about the ZnO/quartz structure, a nearly zero TCF with a small electro-mechanical coupling coefficient, or non-zero TCF with maximized k2 was reported. However, both zero TCF and maximized k2 have not yet been simultaneously obtained. In this study, we investigated the optimized structure by calculation and also confirmed it by measurement.",

author = "Takaki Murata and Michio Kadota and Kenji Matsuda and Tetsuya Kimura and Hashimoto, {Ken Ya}",

year = "2010",

month = jul,

doi = "10.1143/JJAP.49.07HD25",

language = "English",

volume = "49",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "7 PART 2",

}

TY - JOUR

T1 - Improvements in temperature characteristics and bandwidth for ZnO/quartz structure with large coupling factor

AU - Murata, Takaki

AU - Kadota, Michio

AU - Matsuda, Kenji

AU - Kimura, Tetsuya

AU - Hashimoto, Ken Ya

PY - 2010/7

Y1 - 2010/7

N2 - Recently, several applications have required radio frequency filters with a narrow bandwidth and high attenuations. A ZnO film/quartz structure has a good potential to such a requirement. In this paper, we show the optimization of the ZnO/quartz structure to obtain a nearly zero temperature coefficient of frequency (TCF) while maximizing the electro-mechanical coupling coefficient (k2). In the previous papers published by one of the authors about the ZnO/quartz structure, a nearly zero TCF with a small electro-mechanical coupling coefficient, or non-zero TCF with maximized k2 was reported. However, both zero TCF and maximized k2 have not yet been simultaneously obtained. In this study, we investigated the optimized structure by calculation and also confirmed it by measurement.

AB - Recently, several applications have required radio frequency filters with a narrow bandwidth and high attenuations. A ZnO film/quartz structure has a good potential to such a requirement. In this paper, we show the optimization of the ZnO/quartz structure to obtain a nearly zero temperature coefficient of frequency (TCF) while maximizing the electro-mechanical coupling coefficient (k2). In the previous papers published by one of the authors about the ZnO/quartz structure, a nearly zero TCF with a small electro-mechanical coupling coefficient, or non-zero TCF with maximized k2 was reported. However, both zero TCF and maximized k2 have not yet been simultaneously obtained. In this study, we investigated the optimized structure by calculation and also confirmed it by measurement.

UR - http://www.scopus.com/inward/record.url?scp=77956599990&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77956599990&partnerID=8YFLogxK

U2 - 10.1143/JJAP.49.07HD25

DO - 10.1143/JJAP.49.07HD25

M3 - Article

AN - SCOPUS:77956599990

SN - 0021-4922

VL - 49

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 7 PART 2

M1 - 07HD25

ER -

Improvements in temperature characteristics and bandwidth for ZnO/quartz structure with large coupling factor

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