In-process force monitoring in diamond turning of micro-patterns

Wei Gao; Satoshi Genda; Satoshi Kiyono

doi:10.1117/12.403857

In-process force monitoring in diamond turning of micro-patterns

Wei Gao, Satoshi Genda, Satoshi Kiyono

ENG - Finemechanics

Tohoku University

Research output: Contribution to journal › Conference article › peer-review

Abstract

A fast servo with a force measuring instrument was designed and made to monitor the machining force during generating micro-patterns. The thrust force was found to be on the order of 100mN.

Original language	English
Pages (from-to)	412-416
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4222
DOIs	https://doi.org/10.1117/12.403857
Publication status	Published - 2000
Event	Process Control and Inspection for Industry - Beijing, China Duration: 2000 Nov 8 → 2000 Nov 10

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title = "In-process force monitoring in diamond turning of micro-patterns",

abstract = "A fast servo with a force measuring instrument was designed and made to monitor the machining force during generating micro-patterns. The thrust force was found to be on the order of 100mN.",

author = "Wei Gao and Satoshi Genda and Satoshi Kiyono",

year = "2000",

doi = "10.1117/12.403857",

language = "English",

volume = "4222",

pages = "412--416",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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TY - JOUR

T1 - In-process force monitoring in diamond turning of micro-patterns

AU - Gao, Wei

AU - Genda, Satoshi

AU - Kiyono, Satoshi

PY - 2000

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N2 - A fast servo with a force measuring instrument was designed and made to monitor the machining force during generating micro-patterns. The thrust force was found to be on the order of 100mN.

AB - A fast servo with a force measuring instrument was designed and made to monitor the machining force during generating micro-patterns. The thrust force was found to be on the order of 100mN.

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DO - 10.1117/12.403857

M3 - Conference article

AN - SCOPUS:0034462360

SN - 0277-786X

VL - 4222

SP - 412

EP - 416

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Process Control and Inspection for Industry

Y2 - 8 November 2000 through 10 November 2000

ER -

In-process force monitoring in diamond turning of micro-patterns

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