A fast servo with a force measuring instrument was designed and made to monitor the machining force during generating micro-patterns. The thrust force was found to be on the order of 100mN.
|Number of pages||5|
|Journal||Proceedings of SPIE - The International Society for Optical Engineering|
|Publication status||Published - 2000|
|Event||Process Control and Inspection for Industry - Beijing, China|
Duration: 2000 Nov 8 → 2000 Nov 10