In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system

Yuji Matsumoto; Miki Hiraoka; Masao Katayama; Seiichi Hata; Mikio Fukuhara; Takeshi Wada; Hisamichi Kimura; Akihisa Inoue

doi:10.1016/j.mseb.2007.09.049

In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system

Yuji Matsumoto, Miki Hiraoka, Masao Katayama, Seiichi Hata, Mikio Fukuhara, Takeshi Wada, Hisamichi Kimura, Akihisa Inoue

Materials Development Division

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The thermal behavior of the Zr-based multi-component metallic thin films was investigated under an atmospheric N₂ condition by using pulsed laser deposition (PLD)-combined with in situ laser microscope (LM) system. The Zr-based multi-component metallic thin films were prepared in amorphous by PLD with a stoichiometric target of the Zr-based metallic glass. By comprehensive study with ex situ analyses such as XRD, SEM and EPMA techniques, it was found that the gradual formation of Zr₂Ni alloy particles occurred above 500 °C, and subsequently the inhomogeneous contrast, probably owing to the partial formation of ZrO₂ on the film surface appeared at high temperature.

Original language	English
Pages (from-to)	179-182
Number of pages	4
Journal	Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume	148
Issue number	1-3
DOIs	https://doi.org/10.1016/j.mseb.2007.09.049
Publication status	Published - 2008 Feb 25

Keywords

Laser microscope
Metallic glass
Pulsed laser deposition
Thin film

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1016/j.mseb.2007.09.049

Cite this

Matsumoto, Y., Hiraoka, M., Katayama, M., Hata, S., Fukuhara, M., Wada, T., Kimura, H., & Inoue, A. (2008). In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system. Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 148(1-3), 179-182. https://doi.org/10.1016/j.mseb.2007.09.049

In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system. / Matsumoto, Yuji; Hiraoka, Miki; Katayama, Masao et al.
In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol. 148, No. 1-3, 25.02.2008, p. 179-182.

Research output: Contribution to journal › Article › peer-review

Matsumoto, Y, Hiraoka, M, Katayama, M, Hata, S, Fukuhara, M, Wada, T, Kimura, H & Inoue, A 2008, 'In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system', Materials Science and Engineering B: Solid-State Materials for Advanced Technology, vol. 148, no. 1-3, pp. 179-182. https://doi.org/10.1016/j.mseb.2007.09.049

Matsumoto Y, Hiraoka M, Katayama M, Hata S, Fukuhara M, Wada T et al. In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system. Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 2008 Feb 25;148(1-3):179-182. doi: 10.1016/j.mseb.2007.09.049

@article{6b307569032c482d941f99d16cd30372,

title = "In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system",

abstract = "The thermal behavior of the Zr-based multi-component metallic thin films was investigated under an atmospheric N2 condition by using pulsed laser deposition (PLD)-combined with in situ laser microscope (LM) system. The Zr-based multi-component metallic thin films were prepared in amorphous by PLD with a stoichiometric target of the Zr-based metallic glass. By comprehensive study with ex situ analyses such as XRD, SEM and EPMA techniques, it was found that the gradual formation of Zr2Ni alloy particles occurred above 500 °C, and subsequently the inhomogeneous contrast, probably owing to the partial formation of ZrO2 on the film surface appeared at high temperature.",

keywords = "Laser microscope, Metallic glass, Pulsed laser deposition, Thin film",

author = "Yuji Matsumoto and Miki Hiraoka and Masao Katayama and Seiichi Hata and Mikio Fukuhara and Takeshi Wada and Hisamichi Kimura and Akihisa Inoue",

note = "Funding Information: This work was supported by Ministry of Education, Culture, Sports, Science and Technology Grant Program of Metallic Glass Inorganic Materials Joining Technology Development.",

year = "2008",

month = feb,

day = "25",

doi = "10.1016/j.mseb.2007.09.049",

language = "English",

volume = "148",

pages = "179--182",

journal = "Materials Science and Engineering B: Solid-State Materials for Advanced Technology",

issn = "0921-5107",

publisher = "Elsevier BV",

number = "1-3",

}

TY - JOUR

T1 - In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system

AU - Matsumoto, Yuji

AU - Hiraoka, Miki

AU - Katayama, Masao

AU - Hata, Seiichi

AU - Fukuhara, Mikio

AU - Wada, Takeshi

AU - Kimura, Hisamichi

AU - Inoue, Akihisa

N1 - Funding Information: This work was supported by Ministry of Education, Culture, Sports, Science and Technology Grant Program of Metallic Glass Inorganic Materials Joining Technology Development.

PY - 2008/2/25

Y1 - 2008/2/25

N2 - The thermal behavior of the Zr-based multi-component metallic thin films was investigated under an atmospheric N2 condition by using pulsed laser deposition (PLD)-combined with in situ laser microscope (LM) system. The Zr-based multi-component metallic thin films were prepared in amorphous by PLD with a stoichiometric target of the Zr-based metallic glass. By comprehensive study with ex situ analyses such as XRD, SEM and EPMA techniques, it was found that the gradual formation of Zr2Ni alloy particles occurred above 500 °C, and subsequently the inhomogeneous contrast, probably owing to the partial formation of ZrO2 on the film surface appeared at high temperature.

AB - The thermal behavior of the Zr-based multi-component metallic thin films was investigated under an atmospheric N2 condition by using pulsed laser deposition (PLD)-combined with in situ laser microscope (LM) system. The Zr-based multi-component metallic thin films were prepared in amorphous by PLD with a stoichiometric target of the Zr-based metallic glass. By comprehensive study with ex situ analyses such as XRD, SEM and EPMA techniques, it was found that the gradual formation of Zr2Ni alloy particles occurred above 500 °C, and subsequently the inhomogeneous contrast, probably owing to the partial formation of ZrO2 on the film surface appeared at high temperature.

KW - Laser microscope

KW - Metallic glass

KW - Pulsed laser deposition

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=38949089262&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=38949089262&partnerID=8YFLogxK

U2 - 10.1016/j.mseb.2007.09.049

DO - 10.1016/j.mseb.2007.09.049

M3 - Article

AN - SCOPUS:38949089262

SN - 0921-5107

VL - 148

SP - 179

EP - 182

JO - Materials Science and Engineering B: Solid-State Materials for Advanced Technology

JF - Materials Science and Engineering B: Solid-State Materials for Advanced Technology

IS - 1-3

ER -

In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this