In situ growth monitoring during metalorganic chemical vapor deposition of YBa2Cu3Ox thin films by spectroscopic ellipsometry

Shuu'ichirou Yamamoto; Satoshi Sugai; Yasunari Matsukawa; Akio Sengoku; Hiroshi Tobisaka; Takeo Hattori; Shunri Oda

doi:10.1143/jjap.38.l632

In situ growth monitoring during metalorganic chemical vapor deposition of YBa₂Cu₃O_x thin films by spectroscopic ellipsometry

Shuu'ichirou Yamamoto, Satoshi Sugai, Yasunari Matsukawa, Akio Sengoku, Hiroshi Tobisaka, Takeo Hattori, Shunri Oda

Research output: Contribution to journal › Article › peer-review

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Abstract

We have investigated in situ spectroscopic ellipsometry in the case of atomic layer-by-layer metalorganic chemical vapor deposition of YBa₂Cu₃O_x (YBCO) thin films. We have demonstrated the effectiveness of spectroscopic measurement from the relationship between the film properties and trajectories of the pseudodielectric function of YBCO thin films deposited on SrTiO₃ substrates. We have also demonstrated, in detail, how high-quality crystalline YBCO, formed in the initial growth stage, can be obtained from the imaginary part of the pseudodielectric function around 4.1 eV. Superconductivity of YBCO films can be estimated during film deposition using optical measurements.

Original language	English
Pages (from-to)	L632-L635
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	38
Issue number	6 A/B
DOIs	https://doi.org/10.1143/jjap.38.l632
Publication status	Published - 1999 Jun 15
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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title = "In situ growth monitoring during metalorganic chemical vapor deposition of YBa2Cu3Ox thin films by spectroscopic ellipsometry",

abstract = "We have investigated in situ spectroscopic ellipsometry in the case of atomic layer-by-layer metalorganic chemical vapor deposition of YBa2Cu3Ox (YBCO) thin films. We have demonstrated the effectiveness of spectroscopic measurement from the relationship between the film properties and trajectories of the pseudodielectric function of YBCO thin films deposited on SrTiO3 substrates. We have also demonstrated, in detail, how high-quality crystalline YBCO, formed in the initial growth stage, can be obtained from the imaginary part of the pseudodielectric function around 4.1 eV. Superconductivity of YBCO films can be estimated during film deposition using optical measurements.",

author = "Shuu'ichirou Yamamoto and Satoshi Sugai and Yasunari Matsukawa and Akio Sengoku and Hiroshi Tobisaka and Takeo Hattori and Shunri Oda",

year = "1999",

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doi = "10.1143/jjap.38.l632",

language = "English",

volume = "38",

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T1 - In situ growth monitoring during metalorganic chemical vapor deposition of YBa2Cu3Ox thin films by spectroscopic ellipsometry

AU - Yamamoto, Shuu'ichirou

AU - Sugai, Satoshi

AU - Matsukawa, Yasunari

AU - Sengoku, Akio

AU - Tobisaka, Hiroshi

AU - Hattori, Takeo

AU - Oda, Shunri

PY - 1999/6/15

Y1 - 1999/6/15

N2 - We have investigated in situ spectroscopic ellipsometry in the case of atomic layer-by-layer metalorganic chemical vapor deposition of YBa2Cu3Ox (YBCO) thin films. We have demonstrated the effectiveness of spectroscopic measurement from the relationship between the film properties and trajectories of the pseudodielectric function of YBCO thin films deposited on SrTiO3 substrates. We have also demonstrated, in detail, how high-quality crystalline YBCO, formed in the initial growth stage, can be obtained from the imaginary part of the pseudodielectric function around 4.1 eV. Superconductivity of YBCO films can be estimated during film deposition using optical measurements.

AB - We have investigated in situ spectroscopic ellipsometry in the case of atomic layer-by-layer metalorganic chemical vapor deposition of YBa2Cu3Ox (YBCO) thin films. We have demonstrated the effectiveness of spectroscopic measurement from the relationship between the film properties and trajectories of the pseudodielectric function of YBCO thin films deposited on SrTiO3 substrates. We have also demonstrated, in detail, how high-quality crystalline YBCO, formed in the initial growth stage, can be obtained from the imaginary part of the pseudodielectric function around 4.1 eV. Superconductivity of YBCO films can be estimated during film deposition using optical measurements.

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In situ growth monitoring during metalorganic chemical vapor deposition of YBa₂Cu₃O_x thin films by spectroscopic ellipsometry

Abstract

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