In situ monitoring of Zn* and Mg* species during helicon-wave-excited-plasma sputtering epitaxy of ZnO and Mg 0.06Zn0.94O films

T. Koyama; T. Ohmori; N. Shibata; T. Onuma; S. F. Chichibu

doi:10.1116/1.1768522

In situ monitoring of Zn* and Mg* species during helicon-wave-excited-plasma sputtering epitaxy of ZnO and Mg _0.06Zn_0.94O films

T. Koyama, T. Ohmori, N. Shibata, T. Onuma, S. F. Chichibu

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

The results of Plume Emission spectroscopy (PES) on Zno and MgO, to identify the atomic species responsible for the Mg_xZn1-xO epitaxial formation, are discussed. The structural qualities of the epilayers were improved by the use of nearly lattice-matched substrates having proper surface arrangements. The epilayers found to have atomically smooth surfaces along with the 0.26-nm-high monolayer steps in ZnO epilayers. The results show that the ZnO and Mg_0.06Zn0.94O epilayers exhibits a predominant near-band-edge photoluminesence peak at room temperature.

Original language	English
Pages (from-to)	2220-2225
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	4
DOIs	https://doi.org/10.1116/1.1768522
Publication status	Published - 2004 Jul
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1768522

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In situ monitoring of Zn* and Mg* species during helicon-wave-excited-plasma sputtering epitaxy of ZnO and Mg _0.06Zn_0.94O films. / Koyama, T.; Ohmori, T.; Shibata, N. et al.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 22, No. 4, 07.2004, p. 2220-2225.

Research output: Contribution to journal › Article › peer-review

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abstract = "The results of Plume Emission spectroscopy (PES) on Zno and MgO, to identify the atomic species responsible for the MgxZn1-xO epitaxial formation, are discussed. The structural qualities of the epilayers were improved by the use of nearly lattice-matched substrates having proper surface arrangements. The epilayers found to have atomically smooth surfaces along with the 0.26-nm-high monolayer steps in ZnO epilayers. The results show that the ZnO and Mg0.06Zn0.94O epilayers exhibits a predominant near-band-edge photoluminesence peak at room temperature.",

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AU - Shibata, N.

AU - Onuma, T.

AU - Chichibu, S. F.

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N2 - The results of Plume Emission spectroscopy (PES) on Zno and MgO, to identify the atomic species responsible for the MgxZn1-xO epitaxial formation, are discussed. The structural qualities of the epilayers were improved by the use of nearly lattice-matched substrates having proper surface arrangements. The epilayers found to have atomically smooth surfaces along with the 0.26-nm-high monolayer steps in ZnO epilayers. The results show that the ZnO and Mg0.06Zn0.94O epilayers exhibits a predominant near-band-edge photoluminesence peak at room temperature.

AB - The results of Plume Emission spectroscopy (PES) on Zno and MgO, to identify the atomic species responsible for the MgxZn1-xO epitaxial formation, are discussed. The structural qualities of the epilayers were improved by the use of nearly lattice-matched substrates having proper surface arrangements. The epilayers found to have atomically smooth surfaces along with the 0.26-nm-high monolayer steps in ZnO epilayers. The results show that the ZnO and Mg0.06Zn0.94O epilayers exhibits a predominant near-band-edge photoluminesence peak at room temperature.

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In situ monitoring of Zn* and Mg* species during helicon-wave-excited-plasma sputtering epitaxy of ZnO and Mg _0.06Zn_0.94O films

Abstract

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