In situ observation of oxygen gettering by titanium overlayer on Hf O2 Si O2 Si using high-resolution Rutherford backscattering spectroscopy

Kaoru Nakajima, Akira Fujiyoshi, Zhao Ming, Motofumi Suzuki, Kenji Kimura

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

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