TY - JOUR
T1 - In-situ TEM observation of interfacial reactions in the Zr/Si system
AU - Tanaka, Hiroyuki
AU - Konno, Toyohiko J.
AU - Sinclair, Robert
PY - 1994
Y1 - 1994
N2 - The interfacial reactions in the Zr/Si system were studied by in-situ cross-section TEM including high resolution mode. The reactions consisted of formation of an amorphous interlayer followed by the nucleation and growth of crystalline ZrSi2. The development of the amorphous layer was found to involve two different stages. The ZrSi2 was also found to grow layer-by-layer into the Si via a ledge mechanism.
AB - The interfacial reactions in the Zr/Si system were studied by in-situ cross-section TEM including high resolution mode. The reactions consisted of formation of an amorphous interlayer followed by the nucleation and growth of crystalline ZrSi2. The development of the amorphous layer was found to involve two different stages. The ZrSi2 was also found to grow layer-by-layer into the Si via a ledge mechanism.
UR - http://www.scopus.com/inward/record.url?scp=0028553191&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0028553191&partnerID=8YFLogxK
U2 - 10.1557/proc-337-481
DO - 10.1557/proc-337-481
M3 - Conference article
AN - SCOPUS:0028553191
SN - 0272-9172
VL - 337
SP - 481
EP - 485
JO - Materials Research Society Symposium Proceedings
JF - Materials Research Society Symposium Proceedings
T2 - Proceedings of the 1994 MRS Spring Meeting
Y2 - 4 April 1994 through 8 April 1994
ER -