InAs/AlGaSb piezoresistive cantilever for sub-angstrom scale displacement detection

Lionel F. Houlet; Hiroshi Yamaguchi; Sen Miyashita; Yoshiro Hirayama

doi:10.1143/jjap.43.l424

InAs/AlGaSb piezoresistive cantilever for sub-angstrom scale displacement detection

Lionel F. Houlet, Hiroshi Yamaguchi, Sen Miyashita, Yoshiro Hirayama

Center for Science and Innovation in Spintronics (CSIS)

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

We report on the fabrication and characterization of 0.3-μm-thick piezoresistive cantilevers based on the InAs/AlGaSb heterostructure. The dependence of the displacement resolution on the cantilever size, which ranges from 20×10 to 2×1 μm², has been studied by a novel characterization method using an atomic force microscope. The results show that downscaling the cantilevers improves their performances, and an optimum resolution of 0.26Å/Hz^0.5 was obtained with a 3×1.5 μm² cantilever at a modulation frequency of 714 Hz. A finite-element simulator allowed the calculation of the resonance frequencies and a maximum value of 20.5 MHz was obtained for the 3 × 1.5μm ² cantilever.

Original language	English
Pages (from-to)	L424-L426
Journal	Japanese Journal of Applied Physics
Volume	43
Issue number	3 B
DOIs	https://doi.org/10.1143/jjap.43.l424
Publication status	Published - 2004 Mar 15

Keywords

AFM
Cantilever
InAs/AlGaSb
Piezoresistivity
Subangstrom

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10.1143/jjap.43.l424

Cite this

@article{0d30885513f24927a199816c41c84041,

title = "InAs/AlGaSb piezoresistive cantilever for sub-angstrom scale displacement detection",

abstract = "We report on the fabrication and characterization of 0.3-μm-thick piezoresistive cantilevers based on the InAs/AlGaSb heterostructure. The dependence of the displacement resolution on the cantilever size, which ranges from 20×10 to 2×1 μm2, has been studied by a novel characterization method using an atomic force microscope. The results show that downscaling the cantilevers improves their performances, and an optimum resolution of 0.26{\AA}/Hz0.5 was obtained with a 3×1.5 μm2 cantilever at a modulation frequency of 714 Hz. A finite-element simulator allowed the calculation of the resonance frequencies and a maximum value of 20.5 MHz was obtained for the 3 × 1.5μm 2 cantilever.",

keywords = "AFM, Cantilever, InAs/AlGaSb, Piezoresistivity, Subangstrom",

author = "Houlet, {Lionel F.} and Hiroshi Yamaguchi and Sen Miyashita and Yoshiro Hirayama",

year = "2004",

month = mar,

day = "15",

doi = "10.1143/jjap.43.l424",

language = "English",

volume = "43",

pages = "L424--L426",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "3 B",

}

TY - JOUR

T1 - InAs/AlGaSb piezoresistive cantilever for sub-angstrom scale displacement detection

AU - Houlet, Lionel F.

AU - Yamaguchi, Hiroshi

AU - Miyashita, Sen

AU - Hirayama, Yoshiro

PY - 2004/3/15

Y1 - 2004/3/15

N2 - We report on the fabrication and characterization of 0.3-μm-thick piezoresistive cantilevers based on the InAs/AlGaSb heterostructure. The dependence of the displacement resolution on the cantilever size, which ranges from 20×10 to 2×1 μm2, has been studied by a novel characterization method using an atomic force microscope. The results show that downscaling the cantilevers improves their performances, and an optimum resolution of 0.26Å/Hz0.5 was obtained with a 3×1.5 μm2 cantilever at a modulation frequency of 714 Hz. A finite-element simulator allowed the calculation of the resonance frequencies and a maximum value of 20.5 MHz was obtained for the 3 × 1.5μm 2 cantilever.

AB - We report on the fabrication and characterization of 0.3-μm-thick piezoresistive cantilevers based on the InAs/AlGaSb heterostructure. The dependence of the displacement resolution on the cantilever size, which ranges from 20×10 to 2×1 μm2, has been studied by a novel characterization method using an atomic force microscope. The results show that downscaling the cantilevers improves their performances, and an optimum resolution of 0.26Å/Hz0.5 was obtained with a 3×1.5 μm2 cantilever at a modulation frequency of 714 Hz. A finite-element simulator allowed the calculation of the resonance frequencies and a maximum value of 20.5 MHz was obtained for the 3 × 1.5μm 2 cantilever.

KW - AFM

KW - Cantilever

KW - InAs/AlGaSb

KW - Piezoresistivity

KW - Subangstrom

UR - http://www.scopus.com/inward/record.url?scp=2442719421&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2442719421&partnerID=8YFLogxK

U2 - 10.1143/jjap.43.l424

DO - 10.1143/jjap.43.l424

M3 - Article

AN - SCOPUS:2442719421

SN - 0021-4922

VL - 43

SP - L424-L426

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 3 B

ER -

InAs/AlGaSb piezoresistive cantilever for sub-angstrom scale displacement detection

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